Magnetic garnet material, faraday rotator, optical device, bismuth-substituted rare earth-iron-garnet single-crystal film and method for producing the same and crucible for producing the same

ABSTRACT

Proposed is a technique of producing a magnetic garnet material of which the light absorption characteristics worsen little even though it is produced through LPE. The crucible for LPE is formed of a material containing Au. The amount of Au to be taken in single crystal formed in an Au crucible is smaller than that of Pt to be taken therein formed in a Pt crucible. As compared with Pt, the influence of Au on magnetic garnet film that increases the insertion loss in the film is small.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a magnetic garnet material for use inoptical communication systems, a Faraday rotator, an optical device, abismuth-substituted rare earth-iron-garnet single-crystal film and amethod for producing the same and a crucible for producing the same,especially to a technique for obtaining a Faraday rotator that has theadvantages of reduced insertion loss and improved magnetic properties.

2. Description of the Related Art

Optical communication is now being much popularized instead of electriccommunication of small transmission capacity. The reason is essentiallybecause optical communication enables high-speed large-capacitytransmission, it is favorable for long-distance transmission notrequiring too many relays, and it is not influenced by electromagneticnoise, as will be described hereinunder.

Light falls in the same concept as that of radio waves used in TV andradio broadcasting and in radio communication, in that they areelectromagnetic waves. However, the number of frequency ofelectromagnetic waves that are used in optical communication is about200 THz and is about 20000 times that of radio waves (about 10 GHz) usedin satellite broadcasting. The higher frequency means shorterwavelength, and enables high-speed transmission of more signals. Thewavelength (center wavelength) of electromagnetic waves that are used inoptical communication is 1.31 μm and 1.55 μm.

As well known, optical fibers that are used in optical communicationhave a two-layered structure of glass in which the refractive index ofone layer differs from that of the other layer. The light that runsthrough the center core of such optical fibers is repeatedly reflectedinside the core, and therefore optical fibers can accurately transmitsignals through them even though they are bent. In addition, sincehigh-purity quartz glass of high transparency is used for opticalfibers, the data attenuation in optical communication through them isonly about 0.2 dB per km. Accordingly, optical fibers enable datatransmission even to a distance of about 100 km with no amplifiertherein, and as compared with that in electric communication, the numberof relays in optical communication may be reduced.

Electric communication shall face a problem of EMI (electromagneticinterference), but optical communication through optical fibers is notinfluenced by electromagnetic induction noise. Therefore, opticalcommunication enables information transmission of extremely highquality.

In current optical communication systems, electric signals are convertedinto optical signals by LD (laser diode) in light transmitter. Theoptical signals are transmitted by optical fibers and then convertedinto electric signals by PD (photodiode) in light receiver. In thatmanner, the indispensable elements in optical communication systems areLD, PD, optical fibers and optical connectors. Apart from relativelylow-speed short-distance communication systems, high-speed long-distancecommunication systems require optical transmission devices such asoptical amplifier and optical divider, and also other optical devices tobe combined with them, such as optical isolator, optical coupler,optical branching filter, optical switch, optical modulator and opticalattenuator, in addition to the elements mentioned above.

In high-speed long-distance transmission or multi-branch opticalcommunication systems, the element that is especially important isoptical isolator. In current optical communication systems, opticalisolators are used in LD modules of optical transmitters and in relays.The role of optical isolator is to transmit light only in one directionand to interrupt the light that has reflected in its running course toturn back. Faraday effect, a type of magneto-optical effect is appliedto optical isolator. Faraday effect indicates a phenomenon of such thatthe plane of polarization of light is rotated after having passedthrough a transparent medium that is in a magnetic field appliedthereto. The phenomenon of light of which the plane of polarization isrotated is referred to as rotary polarization. Magneto-optical rotation(Faraday rotation) to be caused by Faraday effect differs from ordinaryoptical rotation (natural optical rotation) in that, even when the lighttraveling direction is reversed, its rotary direction does not stillchange. An optical element that takes advantage of the phenomenon ofrotary polarization owing to Faraday effect is referred to as a Faradayrotator.

Faraday rotator has some influence on the performance of opticalisolator that comprises it. Accordingly, the properties of the materialsto constitute Faraday rotators are important for obtaining opticalisolators of high performance. The matters of importance in selectingthe materials to constitute Faraday rotators are that the selectedmaterials enable a large Faraday rotation angle at the wavelength oflight for service (1.31 μm and 1.55 μm for optical fibers) and theirtransparency is high. At first, YIG (yttrium-iron-garnet; Y₃Fe₅O₁₂) wasused for the material that satisfies the requirements. However, theproblems with YIG are that its mass-scale productivity is low and itssize reduction is difficult. Meanwhile it has been found that, when therare earth site of garnet-type crystals is substituted with Bi(bismuth), then the Faraday rotation performance of the resultingcrystals is drastically improved. After that, Bi-substituted rareearth-iron-garnet single-crystal film (hereinafter this will be simplyreferred to as “garnet single-crystal film”) has been used for Faradayrotators.

Bi-substituted rare earth-iron-garnet single-crystal film is formed in amode of liquid phase epitaxial growth (LPE). In a process of LPE,bismuth oxide, and rare earth, iron and garnet oxides (startingcomponents) that include, for example, ferric oxide and rare earthoxides are formed into a starting material composition along with a fluxcomponent that contains lead oxide and boron oxide, and this is put intoa Pt crucible. Next, the crucible is heated at a predeterminedtemperature in which the starting components are thereby melted into amelt. Next, the melt is cooled to be in a supercooled condition, and itis contacted with an LPE substrate while the substrate is rotated,whereby the intended garnet single-crystal film epitaxially grows on theLPE substrate.

One problem which has heretofore been pointed out with the LPE processof forming such a garnet single-crystal film is that the crucible usedis corroded. It is well known that Pt is highly resistant to corrosion,but its corrosion resistance to lead oxide that forms the flux componentand to the bismuth oxide-containing melt is unsatisfactory. Accordingly,even Pt crucibles are significantly corroded at the area around the faceof the melt therein when the level of the melt is kept constant.

For preventing crucibles from being corroded by the melt therein, JP-A9-175898 (hereinafter referred to as “Reference 1”) describes a methodof moving the level of the melt in a crucible to thereby move the regionof the crucible that may be corroded by the melt, and this is forcontrolling the amount of dissolution of crucibles. JP-A 11-322496(hereinafter referred to as “Reference 2”) describes a method ofproviding, inside a Pt crucible, a Pt corrosion inhibitor separable fromthe Pt crucible. The methods described in Reference 1 and Reference 2will be good since they are effective for reducing the frequency ofexchanging or recasting Pt crucibles.

However, the methods described in Reference 1 and Reference 2 could notstill reduce the amount of Pt to be released from corroded crucibles tocontaminate the melt in the crucibles. Pt taken in the garnetsingle-crystal film increases the light absorption of the film. This isbecause the element Pt to be a tetravalent cation is taken in the garnetsingle-crystal film and the film therefore loses its charge balance, andthe light absorption characteristics of the film are thereby worsened.

For preventing the light absorption characteristics of such garnetsingle-crystal film from being worsened, some methods have heretoforebeen investigated. For example, the film is subjected to suitable heattreatment, or a suitable amount of an element to be a divalent cation(e.g., Ca) or an element to be a tetravalent cation (e.g., Ge) is addedthereto so as to keep the charge balance of the film. However, even theheat treatment or the addition of the element to be a divalent ortetravalent cation could not always satisfactorily restore the lightabsorption characteristics of the film.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a magnetic garnetmaterial capable of realizing reduced insertion loss and improvedmagnetic characteristics, a Faraday rotator, an optical device, abismuth-substituted rare earth-iron-garnet single-crystal film and amethod for producing it and a crucible for its production.

While a Bi-substituted rare earth-iron-garnet single-crystal film isgrown in a Pt crucible, Pt that constitutes the crucible graduallydissolves in the flux in the crucible. In addition, Pt is substitutedwith Fe in the garnet single crystal and is thereby taken in thecrystal. In this connection, we, the present inventors have reached thefollowing knowledge. The amount of Pt that dissolves in the flux and isthereby taken in the garnet single crystal increases in the direction inwhich the garnet single-crystal film grows, and the amount of Pt to betaken in the garnet single crystal gradually increases owing to thetemperature change in the process of the growth of the garnetsingle-crystal film.

As in the above, the amount of Pt gradually increases in the process ofthe growth of the garnet single-crystal film. In other words, the amountof Pt varies in the direction of the thickness of the garnetsingle-crystal film. Accordingly, even when a part of the garnetsingle-crystal film could have a charge balance, the other part thereofcould not. Namely, the garnet single-crystal film still loses its chargebalance as a whole. When light is applied to the garnet single-crystalfilm in that condition, the film absorbs the light. Therefore, the lightinsertion loss in the Faraday rotator formed of the garnetsingle-crystal film is great.

Given that situation, we, the present inventors have specifically notedthat metal elements to be trivalent cations would be hardly taken inBi-substituted rare earth-iron garnet single crystals and, even if takenin the crystals, the elements would not break the charge balance ofgarnet single-crystal films. Accordingly, the invention provides amagnetic garnet material formed of a bismuth-substituted rareearth-iron-garnet single-crystal film, for which the chemicalcomposition of the single-crystal film is represented by:Bi_((3-x))A_(x)Fe_((5-y-z))M_(y)T_(z)O₁₂wherein A is one or more selected from a group of rare earth elementsincluding Y, and Ca; M is one or more selected from a group of Ga, Al,Ge, Sc, In, Si, Ti, Mg, Mn and Zr; T is one or more selected from agroup of Au, Rh and Ir; 0.2≦x≦2.5, 0≦y≦2.0, and 0<z≦0.1.

The magnetic garnet material of the invention is characterized in thatthe concentration distribution of the element T is almost uniform in thedirection of the thickness of the single-crystal film. Thischaracteristic of the material is contrastive to the fact that the Ptconcentration distribution in garnet single-crystal film formed in Ptcrucibles is proportional to the distance extending in the direction ofthe thickness of the film.

Magnetic garnet material includes two types of soft magnetism and hardmagnetism, and the former loses its Faraday effect when the externalmagnetic field around it is removed, while the latter still keeps itsFaraday effect even when the external magnetic field around it isremoved. Optical isolator that contains a Faraday rotator formed of asoft magnetic garnet material needs a permanent magnet for imparting anexternal magnetic field to the Faraday rotator. Contrary to this, apermanent magnet may be omitted in optical isolator that contains aFaraday rotator formed of a hard magnetic garnet material. Permanentmagnet omission may reduce the size and the cost of optical isolatorsand even other various appliances and structures that take advantage ofFaraday effect. For these reasons, Bi-substituted rare earth-iron-garnetsingle-crystal films of hard magnetism are developed. The presentinvention may apply to both types of magnetic garnet material of softmagnetism and hard magnetism.

We, the present inventors have found that Pt concentration distribution,if any, in magnetic garnet material has some negative influence on thehard magnetism of the material. Though its reason will be described indetail hereinunder, a Faraday rotator formed of a Bi-substituted rareearth-iron-garnet single-crystal film in which the Pt concentrationincreased from the initial stage to the latter stage of the film growthhas two Faraday rotation angles at around the compensation temperaturethereof. In this description, the phenomenon of multiple Faradayrotation angles appearing separated from each other is referred to as“split”. Of the hard magnetic Faraday rotator with such a split, thecoercive force is lowered. The compensation temperature of hard magneticgarnet single-crystal film falls within the service temperature range ofthe Faraday rotator formed of the film (generally from −40 to 85° C.),and it is desirable that the split is prevented from occurring at aroundthe compensation temperature. As well known by anyone skilled in theart, the compensation temperature of the film is a temperature at whichthe overall magnetic moment of the rare earth element ions is the sameas that of the Fe ions in the film and therefore the apparentmagnetization of the film is 0 (zero). However, as shown in the Examplesgiven hereinunder, the spontaneous magnetization of some actuallyproduced hard magnetic garnet materials could be the lowermost value ataround room temperature, but could not be 0. In this description, thetemperature at which the spontaneous magnetization is the lowermostvalue may also be referred to as a compensation temperature forconvenience sake.

Contrary to it, the hard magnetic garnet material of the inventionmentioned above may evade split occurrence at around the compensationtemperature thereof.

Of the elements for T mentioned above, Au is most preferred in theinvention. Accordingly, the invention provides a Faraday rotator formedof an Au-containing bismuth-substituted rare earth-iron-garnetsingle-crystal film, which has the ability to rotate the plane ofpolarization of the incident light thereon and in which the insertionloss is 0.03 dB or less. Preferably, the amount of Au in thesingle-crystal film is 0.01 or less (not including 0) in terms of themolar ratio thereof.

The single-crystal film that forms the Faraday rotator of the inventionallows the presence of Pt therein. This is because Pt does not have anynegative influence on the insertion loss so far as the amount of Pt inthe single-crystal film is limited to 0.01 or less in terms of the molarratio thereof.

The invention also provides an optical device that comprises theabove-mentioned Faraday rotator. The optical device comprises a firstoptical element inputs forward incident light thereon, a second opticalelement that is disposed opposite to the first optical element via apredetermined distance therebetween and transmits the forward light, anda Faraday rotator that is disposed between the first optical element andthe second optical element so as to rotate the plane of polarization ofthe light having passed through the first optical element and totransmit it toward the second optical element; in which the Faradayrotator is formed of an Au-containing bismuth-substituted rareearth-iron-garnet single-crystal film, and has the ability to rotate theplane of polarization of the incident light thereon, and its insertionloss is 0.03 dB or less.

The invention also provides a method for obtaining the Au-containingbismuth-substituted rare earth-iron-garnet single-crystal film of theinvention. The method is grouped into a first method and a secondmethod. The first method is essentially characterized in that thecrucible to be used in forming the garnet single-crystal film throughLPE comprises Au. The second method is essentially characterized in thatthe starting material to form the garnet single-crystal film containsAu.

The first method is for producing a bismuth-substituted rareearth-iron-garnet single-crystal film in a mode of liquid-phaseepitaxial growth, and this comprises a step of putting a startingmaterial composition for the bismuth-substituted rare earth-iron-garnetsingle-crystal film and a flux composition into a crucible that containsAu at least in the site thereof to be kept in contact with a melttherein, a step of heating and melting the starting material compositionto be a melt, a step of cooling the melt to a temperature at which thebismuth-substituted rare earth-iron-garnet single-crystal film grows,and a step of contacting the thus-cooled melt with a single-crystalfilm-growing substrate to thereby make the intended bismuth-substitutedrare earth-iron-garnet single-crystal film grow on the substrate.

The second method is for producing a bismuth-substituted rareearth-iron-garnet single-crystal film in a mode of liquid-phaseepitaxial growth, and this comprises a step of putting a startingmaterial composition for the bismuth-substituted rare earth-iron-garnetsingle-crystal film, Au and a flux composition into a crucible, a stepof heating and melting the starting material composition and Au to be amelt, a step of cooling the melt to a temperature at which thebismuth-substituted rare earth-iron-garnet single-crystal film grows,and a step of contacting the thus-cooled melt with a single-crystalfilm-growing substrate to thereby make the intended bismuth-substitutedrare earth-iron-garnet single-crystal film grow on the substrate.

The invention also provides the crucible to be used in the first method.The crucible is used in producing the bismuth-substituted rareearth-iron-garnet single-crystal film in a mode of liquid-phaseepitaxial growth, and at least its region that is kept in contact withthe melt is formed of Au or Au alloy.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a graph showing the relationship between the amount of Pt andinsertion loss;

FIG. 2 is a view for explaining a process of LPE;

FIG. 3 is a view showing a way of stirring a melt in the process of LPE;

FIG. 4 is a view showing the constitution of an optical communicationsystem in which is used the Faraday rotator of the first embodiment ofthe invention;

FIG. 5 is a view showing the constitution of an LD module in which isused the Faraday rotator of the first embodiment of the invention;

FIG. 6 is a view showing the constitution of an optical isolator inwhich is used the Faraday rotator of the first embodiment of theinvention;

FIG. 7 us a graph showing the Au and Pt concentration distribution in asingle-crystal film in the direction of the thickness of the film;

FIG. 8 is a view showing the relationship between the external magneticfield and the Faraday rotation angle of the Faraday rotator of Example1-2 of the first embodiment of the invention;

FIG. 9 is a view showing the relationship between the external magneticfield and the Faraday rotation angle of the Faraday rotator ofComparative Example 1-2 for the first embodiment of the invention;

FIG. 10 is a view for explaining the reason of the split of Faradayrotation angles;

FIG. 11 is a view showing the direction in which light runs through aFaraday rotator and the direction of the magnetic field around therotator;

FIG. 12 is a graph showing the magnetic hysteresis of the Faradayrotation angle of a Faraday rotator formed of a conventional, hardmagnetic, Bi-substituted rare earth-iron-garnet single-crystal film;

FIG. 13 is a graph showing the relationship between the spontaneousmagnetization M and the temperature of a Faraday rotator formed of ahard magnetic, Bi-substituted rare earth-iron-garnet single-crystalfilm;

FIG. 14 is a view schematically showing the spin orientation of aBi-substituted rare earth-iron-garnet single-crystal film at around thecompensation temperature Tc thereof;

FIG. 15 is a view schematically showing the spin orientation of aBi-substituted rare earth-iron-garnet single-crystal film at atemperature T2 higher than the compensation temperature Tc thereof;

FIG. 16 is a view schematically showing the spin orientation of aBi-substituted rare earth-iron-garnet single-crystal film at atemperature T1 lower than the compensation temperature Tc thereof;

FIG. 17A to FIG. 17E are views schematically showing the constitution ofa Faraday rotator which has two regions where the sum of the magneticmoments of iron ions and rare earth element ions differs from eachother, and the magnetic characteristics of each region;

FIG. 18 is a graph showing the magnetic hysteresis of the Faradayrotation angle of the Faraday rotator of the third embodiment of theinvention;

FIG. 19 is a view showing the outline constitution of a Faraday rotatorand the direction in which light runs through the rotator;

FIG. 20A and FIG. 20B are graphs each showing the distribution of theamount of divalent or tetravalent cations in the direction of thethickness of a Bi-substituted rare earth-iron-garnet single-crystal filmfor Faraday rotators; and

FIG. 21A and FIG. 21B are graphs each showing the distribution of theamount of divalent or tetravalent cations in the direction of thethickness of a Bi-substituted rare earth-iron-garnet single-crystal filmfor Faraday rotators of the fourth embodiment of the invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment of theInvention

The magnetic garnet material, the Faraday rotator, the method forproducing a bismuth-substituted rare earth-iron-garnet single-crystalfilm, and the crucible for the method of the first embodiment of theinvention are described with reference to FIG. 1 to FIG. 10. Themagnetic garnet material of this embodiment has a chemical compositionof:Bi_((3-x))A_(x)Fe_((5-y-z))M_(y)T_(z)O₁₂wherein A is one or more selected from a group of rare earth elementsincluding Y, and Ca; M is one or more selected from a group of Ga, Al,Ge, Sc, In, Si, Ti, Mg, Mn and Zr; T is one or more selected from agroup of Au, Rh and Ir; 0.2≦x≦2.5, 0≦y≦2.0, and 0<z≦0.1.

The composition shows only the elements that are intended to be in thematerial. For example, it does not show Pb that is to be in the materialfrom the flux used in growing the single-crystal film through LPE, butthis embodiment does not deny the presence of any inevitable element inthe material.

The most characteristic indispensable element in the magnetic garnetmaterial of this embodiment is the element T. However, the element T isexpensive and, even if too much in the material, its effect does notincrease in accordance with its increased amount. Therefore, theuppermost limit of the amount of the element T indicated by z is 0.1.Preferably, the uppermost limit of z is 0.05, more preferably 0.01. Theelement T is a metal element to be a trivalent cation, and its valenceis the same as that of the cations constituting the Bi-substituted rateearth-iron-garnet single-crystal film for the material. Accordingly,this does not break the charge balance of the garnet single-crystalfilm, dislike Pt, an element that is stable when it is a tetravalentcation. The metal element to be a trivalent cation includes Au, Rh andIr, any of which is expected to attain the above-mentioned effect inview of the valence of their cations. However, Au is the most desirablefor use herein. As will be described in detail hereinunder, the reasonis because Au is suitable for the material of crucibles for LPE.

In the Bi-substituted rare earth-iron-garnet material of thisembodiment, the element A is one or more selected from a group of rareearth elements including Y (Y, Gd, Tb, Yb, Sm, Eu, Dy, Lu, Tm, Er, Ho,La, Ce, Pr, Nd), and Ca x that indicates the amount of the element Asatisfies 0.2≦x≦2.5. If x is smaller than 0.2, the amount of Bi of whichthe ionic radius is large relatively increases, and if so, the garnetsingle-crystal film growing through LPE on an LPE substrate could notmatch with the substrate in point of the lattice constant. Contrary tothis, if x is larger than 2.5, the amount of Bi relatively decreases,and if so, the Faraday rotation performance of the film material will below. As a result, the thickness of the garnet single-crystal film mustbe increased, but such thick garnet single-crystal film is difficult toform through LPE and the productivity of the film lowers. Preferably,1.0≦x≦2.3, more preferably 1.3≦x≦2.0.

For the rare earth elements, preferably selected are three elements ofGd, Tb and Yb. Of the rare earth elements, Gd has the largest magneticmoment and it is therefore effective for reducing the saturationmagnetization (4 πMs) of the garnet material. The magnetization reversaltemperature of GdBi-type garnet is around −10° C. and is nearer to roomtemperature than the magnetization reversal temperature (−50° C.) ofTbBi-type garnet, and therefore the former GdBi-type garnet is moreadvantageous for obtaining hard magnetic garnet single-crystal film. Inaddition, since Gd does not absorb light having a wavelength of 1.2 μmor more, it is effective for reducing insertion loss.

Tb is an element effective for ensuring temperature characteristics andwavelength characteristics. Gd has a high degree of magnetic anisotropyand is effective for increasing coercive force. However, Tb is superiorto Gd in point of the ability to increase coercive force.

Yb is incorporated into the material for making the lattice constant ofthe garnet single-crystal film match with that of the LPE substrate.This embodiment is based on the premise that the garnet single-crystalfilm is formed through LPE. For increasing the Faraday rotationperformance thereof, crystal with more Bi is desired for the film. TheLPE substrate has a predetermined lattice constant. Bi has a large ionicradius. Therefore, if the amount of Bi is merely increased, the latticeconstant of the intended garnet single-crystal film could not match withthat of the LPE substrate. Therefore, with the amount of Bi to be in thematerial being increased, Yb that has a small ionic radius is added tothe material so as to make the lattice constant of the intended garnetsingle-crystal film well match with that of the LPE substrate. Yb doesnot absorb light that is used in optical communication, and thereforedoes not increase insertion loss.

Sm, Eu and Dy all have a high degree of magnetic anisotropy, like Gd andTb. Lu, Tm, Er, Ho and Y are similar to Yb in that their ionic radii areall small.

In the Bi-substituted rare earth-iron-garnet material of thisembodiment, M is an element to substitute for a part of Fe, and it isone or more selected from a group of Ga, Al, Ge, Sc, In, Si, Ti, Mg, Mnand Zr. Of those, Ga is the most desirable element in view of easygrowth of the garnet single-crystal film containing it. y that indicatesthe degree of substitution of Fe with M satisfies 0≦y≦2.0. However, forhard magnetic materials, or that is, for those showing a square magnetichysteresis, y is preferably at least 0.1. On the other hand, if y ismore than 2.0, unnecessary nuclei form in the melt to give the intendedgarnet single-crystal film and, if so, the garnet single-crystal filmcould not well grow. The preferred range of y for obtaining hardmagnetic garnet single-crystal film is 0.3≦y≦1.7, more preferably0.4≦y≦1.5.

FIG. 1 shows the relationship between the amount of Pt in theBi-substituted rare earth-iron-garnet single crystal film and theinsertion loss in the Faraday rotator formed of the film. In this, thehorizontal axis indicates the amount of Pt (f.u.); and the vertical axisindicates the insertion loss (dB). As in FIG. 1, when the amount of Ptis 0.01 or so, the insertion loss in the Faraday rotator may becontrolled to 0.03 db or so. On the other hand, when the amount of Pt is0, then the insertion loss in the Faraday rotator may be controlled to0.01 dB or so. This suggests that the amount of Pt in the magneticgarnet material of this embodiment is most preferably 0 but a minoramount of Pt may be in the material. However, since Pt is readily takenin garnet single-crystal film while the film grows, and if Pt cruciblesare used in the film formation, it is difficult to reduce the amount ofPt in the formed film to less than 0.01.

The magnetic garnet material of this embodiment may be produced throughLPE. FIG. 2 is a view showing a way of growing a garnet single-crystalfilm through LPE. As in FIG. 2, oxides of rare earth-iron-garnetcomponents (starting material composition) and a flux composition areput into a crucible 10. The oxides of rare earth-iron-garnet componentsinclude ferric oxide, rare earth oxide and bismuth oxide. The fluxcomposition contains lead oxide and boron oxide. However, these areexamples, and may contain any other oxides and flux components dependingon the chemical composition of the garnet single-crystal film to beobtained herein. The elements of constituting the flux component may betaken in the garnet single-crystal film while the film grows. Forexample, when lead oxide is used as one flux component, the grown garnetsingle-crystal film may contain a minor amount of Pb.

This embodiment is characterized in that the crucible 10 used containsAu in at least the site at which the melt 12 is kept in contact with thecrucible 10. The terminology “containing Au” as referred to hereinincludes a case where the crucible 10 is entirely formed of Au and alsoa case where a part of the crucible 10, for example, only the inner wallof the crucible 10 is formed of Au. In addition, this concept includesnot only pure Au but also Au alloys for use in the crucible. The elementthat may be alloyed with Au includes Ir, Rh, Pt.

The starting material composition and the flux composition put in thecrucible 10 are heated by the heating coil 11 with current runningtherethrough, and melted into a melt 12. In the step of forming the melt12, the melt 12 is stirred. This mode is shown in FIG. 3. For example,while heated at about 950° C., the melt 12 is stirred with a stirrer 15.This is for improving the uniformity of the molten condition of the melt12. Preferably, the stirrer 15 is also formed of Au, like the crucible10. If the stirrer 15 is formed of Pt, Pt will dissolve out of thestirrer 15 into the melt 12 while the melt 12 is stirred. Accordingly,in order to enjoy the effect of using the crucible 10 that contains Auat least in the site at which the melt 12 is kept in contact with thecrucible 10, it is desirable that the stirrer 15 is formed of Au. Theterminology “formed of Au” includes not only a case where the stirrer 15itself is formed of Au but also a case where the stirrer 15 itself isformed of a different substance and is coated with a film of Au as wellas a case where the part of the stirrer 15 that may be contacted withthe melt 12 is formed of Au and the other part thereof is formed of anyother substance than Au.

After stirring the melt 12 with the stirrer 15 has been finished, thetemperature of the melt 12 is lowered to, for example, around 800° C. sothat the melt 12 is in a supercooled condition. In this condition, anLPE substrate 13 is contacted with the melt 12 while rotated, as in FIG.2, whereby a garnet single-crystal film 14 epitaxially grows on thesurface (lower face in the drawing) of the LPE substrate 13. Thus havinggrown, the garnet single-crystal film 14 shall take therein the fluxcomponents and Au from the crucible 10 as impurities.

For introducing Au into the Bi-substituted rare earth-iron-garnetsingle-crystal film of this embodiment, the crucible 10 may contain Au(or Au alloy), and apart from it, Au may be added to the startingmaterial. In the latter case, the crucible 10 to be used may contain Auin at least the site at which the melt 12 is contacted with the crucible10, or it may be formed of any other material of, for example, one ormore (as alloy) of Pt, Rh ad Ir.

In the process of growing the garnet single-crystal film 14, the waferholder 16 that holds the LPE substrate 13 may be contacted with the melt12, as in FIG. 2. Therefore, it is desirable that the wafer holder 16 isalso formed of Au. As in FIG. 2, the wafer holder 16 holds the LPEsubstrate 13 at the tip claws thereof. Therefore, at least the tip clawsare formed of Au. The meaning of the terminology “formed of Au” is thesame as above.

The thickness of the garnet single-crystal film thus obtained throughLPE is larger in some degree than that of the Faraday rotator that isdesired to be finally obtained herein. This is because the film ispolished and then worked into the intended Faraday rotator. The garnetsingle-crystal film to be worked into Faraday rotators shall have aFaraday rotation angle of 45 degrees to the wavelength of light forservice. In other words, the garnet single-crystal film obtained throughLPE is polished to have a thickness that ensures its Faraday rotationangle of 45 degrees. Faraday rotator generally has a thickness of around500 μm or so. After thus polished, the surface of the Faraday rotator ispreferably coated with an antireflection film for reducing insertionloss.

The Faraday rotator thus obtained in the manner as above is used inoptical devices such as optical isolator. The optical devices may beused in optical communication systems. With reference to FIG. 4 to FIG.6, described is an optical communication system 1 to which thisembodiment is applied. FIG. 4 shows the constitution of the opticalcommunication system 1. As in FIG. 4, the optical communication system 1is a system for information transmission by optical signals between atransmitter side and a receiver side. On the transmitter side, disposedis an optical transmitter 2; and on the receiver side, disposed is anoptical receiver 3. The optical transmitter 2 is connected with theoptical receiver 3 via an optical transmission line 4 of optical fibers.Optical amplifiers 5 are in the optical transmission line 4. The numberof the optical amplifiers 5 depends on the length of the opticaltransmission line 4.

The optical transmitter 2 comprises an electronic circuit 21 and a laserdiode (LD) module 22. The electronic circuit 21 receives the data to betransmitted as electric signals, and, after having processed them in apredetermined manner, it outputs the thus-processed data to the LDmodule 22. Having received the electric signals, the LD module 22converts them into optical signals and transmits them to the opticaltransmission line 4.

The optical receiver 3 comprises a photodiode (PD) module 31 and anelectronic circuit 32. The PD module 31 converts the optical signals,which it has received from the side of the optical transmitter 2 via theoptical transmission line 4, into electric signals and outputs them tothe electronic circuit 32. The electronic circuit 32 outputs thethus-inputted electric signals to the side of the receiver.

The optical amplifier 5 provided in the optical transmission line 4amplifies the optical signals that are transmitted by the opticaltransmission line 4, for preventing their attenuation.

FIG. 5 shows the constitution of the LD module 22. As in FIG. 5, the LDmodule 22 comprises an LD222 put in a case; a lens 223 that supplies thelight (signal) having a wavelength of 1.31 μm (or 1.55 μm) from theLD222 as parallel rays; an optical isolator 224 that transmits the light(signal) having traveled through the lens 223 only in one direction; anda lens 223 that condenses the light from the optical isolator 224 tosupply it to the optical transmission line 4.

FIG. 6 shows the constitution of the optical isolator 224. As in FIG. 6,the optical isolator 224 is so designed that it has a Faraday rotator224 b disposed between two polarizers 224 a, 224 c. In this embodiment,the Faraday rotator 224 b comprises, for example, a hard magnetic garnetsingle-crystal film. After magnetized by an external magnetic fieldapplied thereto, the hard magnetic garnet single-crystal film keeps themagnetization and becomes a permanent magnet. Therefore, the Faradayrotator 224 b does not require an external magnet for imparting amagnetic field thereto. The Faraday rotator 224 b may also be formed ofa soft, but not hard, magnetic garnet single-crystal film. In that casewhere the Faraday rotator 224 b is formed of such a soft magnetic film,an external magnet, for example, a ring-like permanent magnet isdisposed to surround it. The two polarizers 224 a, 224 c are disposed tobe opposite to each other via a predetermined distance therebetween.When forward light (in the direction of the arrow in the drawing) entersthe polarizer 224 a, then it goes out of the polarizer 224 c toward thelight transmission line 4. For the polarizers 224 a, 224 c, any knownmaterial is usable. For example, Corning's Polar Core (trade name) ispreferred for them, but is not limitative.

The Faraday rotator 224 b rotates the polarization plane of the forwardlight having passed through the polarizer 224 a, for example, by 45degrees, and emits it toward the polarizer 224 c. The polarization axisof the polarizer 224 c is rotated by 45 degrees relative to thepolarization axis of the polarizer 224 a. Accordingly, the polarizer 224c transmits the forward light. On the other hand, the polarization planeof the backward light having entered the polarizer 224 c and havingpassed through the polarizer 224 c is further rotated by 45 degrees bythe Faraday rotator 224 b, and it crosses the polarization axis of thepolarizer 224 a at right angles. Accordingly, the optical isolator 224transmits the forward light from the side of the polarizer 224 a butblocks the backward light from the side of the polarizer 224 c.

In this embodiment, the Faraday rotator 224 b is formed of theabove-mentioned Bi-substituted rare earth-iron-garnet single-crystalfilm. The Faraday rotator 224 b functions as a part of optical devicesuch as the optical isolator 224. In the above, the optical isolator 224has been described as one example of optical device. Needless-to-say,however, the Faraday rotator 224 b of this embodiment may apply to anyother optical device such as optical attenuator, optical circulator andphotomagnetic field sensor.

Examples of this embodiments are mentioned below.

EXAMPLE 1-1

Using the device of FIG. 2, a Bi-substituted rare earth-iron-garnetsingle-crystal film was formed through LPE from starting compounds ofbismuth oxide (Bi₂O₃, 4 N), ferric oxide (Fe₂O₃, 4 N), gadolinium oxide(Gd₂O₃, 5 N), terbium oxide (Tb₄O₇, 3 N), ytterbium oxide (Yb₂O₃, 4 N)and gallium oxide (Ga₂O₃, 4 N). The LPE substrate 13 used is formed of(111) garnet single crystal ((GdCa)₃(GaMgZr)₅O₁₂). The lattice constantof the LPE substrate 13 is 1.2497+/−0.0002 nm. In addition to theabove-mentioned starting compounds, a flux composition of lead oxide(PbO, 4 N) and boron oxide (B₂O₃, 5 N) was also put into the crucible10. The crucible 10 is entirely formed of Au. After the startingmaterial composition and the flux composition were put into thecrucible, these were heated up to 950° C. to melt the starting materialcomposition, and a melt 12 was thus obtained. Next, the melt 12 wasstirred for a predetermined period of time with a stirrer 15 coated withAu. After thus stirred, the melt 12 was cooled to 850° C., and a garnetsingle-crystal film 14 began to grow. In the process of growing thegarnet single-crystal film 14, the LPE substrate 13 was held by a waferholder 16 coated with Au.

The thus-obtained garnet single-crystal film (Example 1-1) was analyzedfor its composition, which was identified asBi_(1.0)Gd_(0.7)Tb_(1.1)Yb_(0.2)Fe_(4.1)Ga_(0.9)Au_(0.0037)O₁₂. Thiscomposition was in the latter stage of the garnet single-crystal filmgrowth, and Pb was omitted for detection. Regarding its magnetism, thegarnet single-crystal film is a hard magnetic composition. The garnetsingle-crystal film was cut into a predetermined size, polished andcoated with an antireflection film. This gave a Faraday rotator having asize of 1 mm×1 mm×0.5 mm. The insertion loss in this Faraday rotator wasmeasured, and it was 0.01 dB. The insertion loss indicates theattenuation of the light that goes out of a rotator, relative to theincident light having entered it.

A Faraday rotator was formed of a garnet single-crystal film(Comparative Example 1-1) that had been obtained in the same manner asabove except that the crucible 10 used was formed of Pt. The compositionof the garnet single-crystal film was identified asBi_(1.0)Gd_(0.7)Tb_(1.1)Yb_(0.2)Fe_(4.1)Ga_(0.9)Pt_(0.02)O₁₂. Theinsertion loss in this Faraday rotator was measured, and it was 0.05 dB.

As in the above, the insertion loss in the Faraday rotator formed of theAu-containing garnet single-crystal film is lower than that of theFaraday rotator formed of the Pt-containing garnet single-crystal film.As so mentioned hereinabove, Bi-substituted rare earth-iron-garnetsingle crystal is trivalent. Au is trivalent, and Pt is tetravalent.Accordingly, when Pt is taken in garnet single crystal, it breaks thecharge balance of the crystal. As opposed to this, Au is an element tobe a trivalent cation, like garnet single crystal, and therefore, evenwhen it is taken in garnet single crystal, it does not break the chargebalance of the crystal. In addition, Au is further characterized in thatit is hardly taken in garnet single crystal, and even when taken thereinonly a little, it forms little concentration distribution in thecrystal. Accordingly, it may be said that Au has little influence on theinsertion loss in the film containing it. The other trivalent elementscapable of being used for the crucible 10 for LPE are Rh and Ir. In thisExample, Au was used for the crucible 10, but in place of it or alloyedwith it, Rh and/or Ir may be used for the crucible 10.

The concentration distribution of Au (Example 1-1) or Pt (ComparativeExample 1-1) in the direction of the thickness of each of the two garnetsingle-crystal films was measured. The results are in FIG. 7. Thehorizontal axis indicates the thickness (μm) of the garnetsingle-crystal film; and the vertical axis indicates the amount of Au orPt (f.u.). In FIG. 7, the side of thickness 0 μm indicates the initialstage of the growth of the garnet single-crystal film, and the side ofthickness 400 μm indicates the latter stage of the growth of the film.As in FIG. 7, the Pt concentration is higher than the Au concentrationall the time throughout the period of from the initial stage to thelatter stage of the growth of the garnet single-crystal film. The Auconcentration distribution is almost uniform in the direction of thefilm thickness, but the Pt concentration distribution linearly increasesfrom the initial stage to the latter stage of the growth of the garnetsingle-crystal film.

This will be because of some reasons such as those mentioned below.First, the ionic radii of Au, Pt and Fe will have some influence on theelement concentration distribution. The ionic radius of Au is 0.99 Å(=0.099 nm); that of Pt is 0.77 Å; and that of Fe is 0.69 Å. The ionicradius of Pt is nearer to that of Fe. Accordingly, Pt may more readilysubstitute for Fe in the garnet single crystal and will be thereforemore readily taken in the crystal. Regarding the crucible 10, the amountof Au or Pt to dissolve out into the flux-containing melt 12 will havesome influence on the element concentration distribution. Specifically,Au is more resistant than Pt to corrosion by the melt 12, and thereforethe amount of Auto dissolve in the melt 12 is smaller than that of Pt.Moreover, the amount of Pt dissolving in the melt 12 will increase withtime. For these reasons as shown in FIG. 7, it is believed that theelement concentration distribution in the direction of the filmthickness differs between Au and Pt. The ionic radius of Rh is 0.81 Å,and that of Ir is 0.82 Å. The ionic radii of these elements are bothlarger than that of Pt, and it is believed that these will be morehardly taken in garnet single crystal than Pt.

EXAMPLE 1-2

Under the same condition as in Example 1-1, a Bi-substituted rareearth-iron-garnet single-crystal film was grown from starting compoundsof bismuth oxide (Bi₂O₃, 4 N), ferric oxide (Fe₂O₃, 4 N), gadoliniumoxide (Gd₂O₃, 5 N), terbium oxide (Tb₄O₇, 3 N), ytterbium oxide (Yb₂O₃,4 N), gallium oxide (Ga₂O₃, 4 N) and germanium oxide (GeO₂, 4 N).

The thus-obtained garnet single-crystal film (Example 1-2) was analyzedfor its composition. The composition analysis was effected in thedirection of the thickness of the garnet single-crystal film, or thatis, in the initial stage of the growth of the film and in the latterstage of the growth thereof. As a result, the composition of the film inthe initial stage of the growth thereof was identified asBi_(1.0)Gd_(0.7)Tb_(1.1)Yb_(0.2)Pb_(0.03)Fe_(4.3)Ga_(0.7)Ge_(0.03)Au_(0.0034)O₁₂,and the composition thereof in the latter stage of the film growth wasasBi_(1.0)Gd_(0.7)Tb_(1.1)Yb_(0.2)Pb_(0.03)Fe_(4.3)Ga_(0.7)Ge_(0.03)Au_(0.0037)O₁₂.In addition, the magnetic properties of the garnet single-crystal filmwere measured with VSM (vibrating sample magnetometer). As a result, atthe compensation temperature thereof, the saturation magnetization (4πMs) of the film was 0 G (1 G=0.1 mT), and the coercive force thereofwas 4 kOe (1 Oe=1/(4 π)×10³ A/m).

The garnet single-crystal film was cut into a predetermined size,polished and coated with an antireflection film. This gave a Faradayrotator having a size of 1 mm×1 mm×0.5 mm. Using a Faraday rotationangle meter, the Faraday rotation performance of the thus-obtainedFaraday rotator was measured. FIG. 8 is a graph showing the relationshipbetween the external magnetic field and the Faraday rotation angle ofthe Faraday rotator of this Example. The horizontal axis indicates amagnetic field, and the vertical axis indicates a Faraday rotation angle(degree). As in FIG. 8, the Faraday rotator of this Example has a goodsquareness profile.

A Faraday rotator was formed of a garnet single-crystal film(Comparative Example 1-2) that had been obtained in the same manner asabove except that the crucible 10 used was formed of Pt. Thethus-obtained Faraday rotator was analyzed for its composition. Like inExample 1-2, the composition analysis was effected in the initial stageand the latter stage of the growth of the garnet single-crystal film. Asa result, the composition of the film in the initial stage of the growththereof was identified asBi_(1.08)Gd_(0.29)Tb_(1.38)Yb_(0.21)Pb_(0.033)Fe_(4.3)Ga_(0.67)Ge_(0.022)Pt_(0.008)O₁₂,and the composition thereof in the latter stage of the film growth wasasBi_(1.09)Gd_(0.30)Tb_(1.37)Yb_(0.20)Pb_(0.035)Fe_(4.3)Ga_(0.7)Ge_(0.016)Pt_(0.024)O₁₂.It is understood that the Pt increase in the film is great from theinitial stage to the latter stage of the film growth. In particular, thePt increase in the garnet single-crystal film is larger than that of anyother constitutive elements of the film. Like in Example 1-2, themagnetic properties of the garnet single-crystal film were measured. Asa result, at the compensation temperature thereof, the saturationmagnetization (4 πMs) of the film was 25 G. The temperature at which thefilm had the saturation magnetization could not be the compensationtemperature of the film in the strict sense of the word, but as somentioned hereinabove, it is herein referred to as the compensationtemperature. This garnet single-crystal film was worked into a Faradayrotator in the same manner as in Example 1-2, and its Faraday rotationperformance was measured. FIG. 9 is a graph showing the relationshipbetween the external magnetic field and the Faraday rotation angle ofthe Faraday rotator of this Comparative Example. The horizontal axisindicates a magnetic field, and the vertical axis indicates a Faradayrotation angle (degree). As in FIG. 9, a split occurred in the rotationangle profile of the Faraday rotator of this Comparative Example.

The reason why the split as above occurs is not clear. However, we, thepresent inventors believe that the reason will be because two phaseshave appeared at different compensation temperatures owing to theconcentration gradation of a predetermined element, especially Pt in thegarnet single-crystal film that forms the Faraday rotator, and theywould cause the occurrence of the split in the rotation angle profile ofthe Faraday rotator. This is further described with reference to FIG.10. In FIG. 10, the center graph shows the relationship between thespontaneous magnetization and the temperature (temperature-dependentspontaneous magnetization curve) of the film. The horizontal axisindicates a temperature and the vertical axis indicates spontaneousmagnetization. The above-mentioned two phases are phase a and phase b.The compensation temperature of the phase a is Tca, and that of thephase b is Tcb (Tca>Tcb).

In the center graph, the one-dot chain line indicates thetemperature-dependent spontaneous magnetization curve of the phase a;and the dotted line indicates the temperature-dependent spontaneousmagnetization curve of the phase b. In the center graph, the solid lineindicates the temperature-dependent spontaneous magnetization curve ofthe measured data of the film. The solid line is defined as theproportional addition of the temperature-dependent spontaneousmagnetization curve of the phase a and the temperature-dependentspontaneous magnetization curve of the phase b. The arrows applied tothe curves show the rotational direction of the light that passesthrough the phase a and the phase b (hereinafter referred to as “Faradayrotational direction”). The white arrows indicate the Faraday rotationaldirection of the phase a; and the black arrows indicate the Faradayrotational direction of the phase b. As in FIG. 10, the Faraday rotationangle in the phase a is toward the downside in the drawing in thetemperature range not higher than Tca (this direction is hereinafterreferred to as a first direction). The Faraday rotation angle in thephase b is also toward the first direction in the temperature range nothigher than Tcb.

The magnetic hysteresis of the Faraday rotation angle at a predeterminedtemperature not higher than Tcb is shown in (I) of FIG. 10. As in (I) ofFIG. 10, it is believed that both the magnetic hysteresis by the phase aand the magnetic hysteresis by the phase b exist. However, the magnetichysteresis actually measured at the predetermined temperature has asquare profile. The reason for it will be because the Faraday rotationangle in the phase a and the Faraday rotation angle in the phase b maybethe same, and the difference in the coercive force between the twophases will be small because the difference in the spontaneousmagnetization at the predetermined temperature is small between them.

Next, at a temperature higher than Tcb, the Faraday rotational directionin the phase b is toward the upside in the drawing (second direction),differing from that within the temperature range not higher than Tcb.This is because the direction of the magnetic field to the phase b isreversed via the boundary at Tcb. On the other hand, however, theFaraday rotation angle in the phase a is still in the first directioneven at a temperature higher than Tcb within the temperature range nothigher than Tca. Accordingly, in the temperature range between Tcb andTca, the Faraday rotational direction in the phase a is opposite to theFaraday rotational direction in the phase b. In addition, it may be saidthat the difference between the spontaneous magnetization of the phase aand that of the phase b at a predetermined temperature within the rangeof from Tcb to Tca is larger than that at a temperature not higher thanTcb. Accordingly, it is understood that there are two different magnetichysteresis profiles of the Faraday rotation angle separately for thephase a and the phase b, at a predetermined temperature falling betweenTcb and Tca, as in (II) of FIG. 10. In fact, however, the actuallymeasured data gave a magnetic hysteresis as in (III) of FIG. 10. It maybe recognized that the magnetic hysteresis of (III) is the sum of themagnetic hysteresis of the phase a and that of phase b in (II) of FIG.10.

At a temperature of higher than Tca, the Faraday rotational direction inthe phase a is the same as that in the phase b. In addition, thedifference between the spontaneous magnetization of the phase a and thatof the phase b is small. Accordingly, as in (IV) of FIG. 10, themagnetic hysteresis actually measured at a predetermined temperaturehigher than Tca has a square profile, like that within the temperaturerange not higher than Tcb, even though there exist two differenthysteresis loops separately for the phase a and the phase b.

The above is our inventors' understanding of the reason for splitoccurrence. With no exception, the split always occurs when theconcentration gradation of the element, Pt substitutable for the ironsite in the magnetic film is significant. Accordingly, reducing the Ptconcentration gradation will be effective for preventing the splitoccurrence.

EXAMPLE 1-3

A Bi-substituted rare earth-iron-garnet single-crystal film was grownlike in Example 1-2. Thus obtained, the garnet single-crystal film(Example 1-3) was analyzed for its composition. Both in the initialstage and in the latter stage of the film growth, the grown film had thefollowing chemical composition. The material having this chemicalcomposition is soft magnetic.Bi_(1.0)Gd_(0.7)Tb_(1.1)Yb_(0.2)Pb_(0.03)Fe_(4.97)Ge_(0.03)Au_(0.003)O₁₂

The garnet single-crystal film was cut into a predetermined size,polished and coated with an antireflection film. This gave a Faradayrotator having a size of 1 mm×1 mm×0.5 mm. The insertion loss in thisFaraday rotator was measured, and it was 0.01 dB.

A Faraday rotator was formed of a garnet single-crystal film(Comparative Example 1-3) that had been obtained in the same manner asabove except that the crucible 10 used was formed of Pt. The compositionof the garnet single-crystal film was Bi₁₀Gd_(0.7)Tb_(1.1)Yb_(0.2)Pb_(0.03)Fe_(4.97)Ge_(0.023)Pt_(0.007)O₁₂ in the initial stageof the film growth, and wasBi_(1.0)Gd_(0.7)Tb_(1.1)Yb_(0.2)Pb_(0.3)Fe_(4.97)Ge_(0.07)Pt_(0.022)O₁₂in the latter stage thereof. The insertion loss in the Faraday rotatorwas measured, and it was 0.04 dB.

As in the above, the insertion loss in the Faraday rotator of Example1-3 is reduced owing to the ideal charge compensation attained therein.Contrary to this, the insertion loss in the Faraday rotator ofComparative Example 1-3 is large since the charge balance thereof hasbeen broken.

As described hereinabove, this embodiment provides a magneticBi-substituted rare earth-iron-garnet material having a reducedinsertion loss. In addition, this embodiment provides a hard magnetic,Bi-substituted rare earth-iron-garnet material with no split even at thecompensation temperature thereof.

Second Embodiment of the Invention

Next described are the magnetic garnet material, the Faraday rotator,the optical device, the bismuth-substituted rare earth-iron-garnetsingle-crystal film and the method for producing the film of the secondembodiment of the invention.

Hard magnetic, Bi-substituted rare earth-iron-garnet single crystalfilms are developed these days. It is known that the magnetic hysteresisof the Faraday rotation angle of hard magnetic garnet single-crystalfilm has a good squareness profile as in FIG. 8.

We, the present inventors have further studied hard magnetic garnetsingle-crystal films. As a result, we have confirmed that the filmsgenerally have a split within a specific temperature range of theservice temperature range of Faraday rotators (generally from −40 to 85°C.), as in FIG. 9. In addition, we have found that the coercive force ofgarnet single-crystal films with such a split is reduced and the filmsare unfavorable for hard magnetic applications.

Given that situation, this embodiment is to provide a magnetic garnetmaterial of which the Faraday rotation angle keeps a square magnetichysteresis profile. This embodiment also provides a Faraday rotator andan optical device that comprises the magnetic garnet material. Thisembodiment further provides a method for producing the magnetic garnetmaterial.

We, the present inventors have studied many Bi-substituted rareearth-iron-garnet single-crystal films of which the Faraday rotationangle shows a magnetic hysteresis profile as in FIG. 9. As a result, wehave at last found that the Pt concentration in the face and the back ofthe garnet single-crystal film of the type greatly varies as comparedwith the concentration of other elements. Pt is not an element thatnaturally constitutes Bi-substituted rare earth-iron-garnetsingle-crystal film, but may be substitutable for the iron site of thegarnet single-crystal film. We, the present inventors have found that aPt concentration gradation is formed from the initial stage to thelatter stage of the growth of garnet single-crystal film and itincreases with the growth of the film. Needless-to-say, the otherelements that constitute garnet single-crystal film have someconcentration distribution (generally from a few % to 20%). However, thePt concentration distribution is remarkable (from 300 to 1000% or so) ascompared with the concentration distribution of the other constitutiveelements. In addition, the saturation magnetization of garnetsingle-crystal film is ideally 0 at the compensation temperaturethereof, but is actually over 20 G.

Bi-substituted rare earth-iron-garnet single-crystal film is formedthrough LPE. The process of LPE comprises putting a starting materialcomposition for Bi-substituted rare earth-iron-garnet single-crystalfilm that comprises bismuth oxide, ferric oxide and rare earth oxides,and a flux composition into a Pt crucible, followed by heating them upto a predetermined temperature to melt the starting material compositionto give a melt. In general, the flux composition contains lead oxide andboron oxide. Next, the melt is cooled to a supercooled condition, andthen contacted with a LPE substrate while the substrate is rotated,whereby the intended garnet single-crystal film is epitaxially grown onthe LPE substrate. It is believed that Pt having been released from thecrucible would be taken in the iron site of the garnet single crystalthat grows in this process. Bi-substituted rare earth-iron-garnetsingle-crystal film having a reduced Pt content was formed, and themagnetic hysteresis of the Faraday rotation angle of the film wasdetermined. As a result, it has been confirmed that the film is freefrom the split as in FIG. 9, within a temperature range for service ofthe film. The saturation magnetization of the Bi-substituted rareearth-iron-garnet single-crystal film of the type may be 20 G or less,preferably 10 G or less, more preferably 2 G or less at the compensationtemperature of the film.

As in the above, this embodiment provides a magnetic garnet material ofa single-crystal film that comprises bismuth-substituted rareearth-iron-garnet, wherein the concentration fluctuation of the elementthat substitutes for the iron site in the single-crystal film is 200% orless and the saturation magnetization of the film at the compensationtemperature thereof is 20 G or less. In the magnetic garnet material,one typical element which substitutes for the iron site and of which theconcentration fluctuation is controlled is Pt. Preferably, the Ptconcentration fluctuation is 200% or less.

The following chemical composition applies to the single-crystal filmfor the magnetic garnet material of this embodiment.Bi_(3-x)A_(x)Fe_((5-y))M_(y)O₁₂wherein A is one or more selected from a group of rare earth elementsincluding Y, and Ca and Pb; M is one or more selected from a group ofGa, Al, Ge, Sc, In, Si, Ti, Mg, Mn, Zr, Au, Ir, Rh and Pt; 0.2≦x≦2.5,and 0≦y≦2.0.

In the above-mentioned chemical composition, when at least Ga isselected for M and when y that indicates the amount of Ga falls within arange of 0.8≦y≦2.0, then Pt substitution for the iron site in thesingle-crystal film having the chemical composition is retarded eventhough the film is formed through LPE in a Pt crucible, and the film isfree from the formation of Pt concentration gradation therein.

This embodiment also provides a Faraday rotator that comprises asingle-crystal film of bismuth-substituted rare earth-iron-garnet havinga composition of the following general formula and an antireflectionfilm formed on the surface of the single-crystal film, wherein theamount of Pt in the single-crystal film is 0.01 or less in terms of themolar ratio thereof and the Pt concentration fluctuation in the face andthe back of the single-crystal film is 200% or less.Bi_(3-x)A_(x)Fe_((5-y))M_(y)O₁₂wherein A is one or more selected from a group of rare earth elementsincluding Y, and Ca and Pb; M is one or more selected from a group ofGa, Al, Ge, Sc, In, Si, Ti, Mg, Mn, Zr, Au, Ir, Rh and Pt; 0.2≦x≦2.5,and 0≦y≦2.0.

This embodiment also provides an optical device comprising a firstoptical element that inputs forward incident light thereon, a secondoptical element that is disposed opposite to the first optical elementvia a predetermined distance therebetween and transmits the forwardlight, and a Faraday rotator that is disposed between the first opticalelement and the second optical element so as to rotate the plane ofpolarization of the light having passed through the first opticalelement and to transmit it toward the second optical element; whereinthe Faraday rotator is formed of a bismuth-substituted rareearth-iron-garnet single-crystal film, and wherein the amount of Pt inthe single-crystal film is 0.01 or less in terms of the molar ratiothereof and the Pt concentration fluctuation in the face and the back ofthe single-crystal film is 200% or less.

This embodiment also provides some methods for retarding theconcentration fluctuation of an element, typically Pt which substitutesfor the iron site in a single-crystal film of Bi-substituted rareearth-iron-garnet that grows through LPE. These methods apply to LPE inPt crucibles.

One method comprises growing a garnet single-crystal film through LPE inan inert gas atmosphere. Specifically, this embodiment provides a methodfor producing a single-crystal film of bismuth-substituted rareearth-iron-garnet in a mode of liquid-phase epitaxial growth, whichcomprises a step of putting a starting material composition for thebismuth-substituted rare earth-iron-garnet and a flux composition into acrucible, a step of heating and melting the starting materialcomposition to be a melt, a step of cooling the melt to a temperature atwhich the single-crystal film grows, and a step of contacting thethus-cooled melt with a single-crystal film-growing substrate to therebymake the intended single-crystal film grow on the substrate, and inwhich the treatment in the melting step and after it is effected in aninert gas atmosphere. Pt forms a compound with oxygen in anoxygen-containing atmosphere such as air and becomes more soluble.Accordingly, the effect of this method is for retarding the Ptdissolution from the crucible used by effecting the treatment in thecrucible in a more reducible atmosphere than air.

As another method for retarding Pt dissolution from crucibles, theinvention further suggests using a flux composition not containing PbO.In this embodiment, the flux composition not containing PbO is referredto as a non-lead flux composition. Accordingly, this embodiment furtherprovides a method for producing a single-crystal film ofbismuth-substituted rare earth-iron-garnet in a mode of liquid-phaseepitaxial growth, which comprises a step of putting constitutive oxidesfor the rare earth-iron-garnet component and a flux component into acrucible, a step of heating and melting the oxides to be a melt, a stepof cooling the melt to a temperature at which the bismuth-substitutedrare earth-iron-garnet single-crystal film grows, and a step ofcontacting the thus-cooled melt with a single-crystal film-growingsubstrate to thereby make the bismuth-substituted rare earth-iron-garnetsingle-crystal film grow on the substrate, and in which the fluxcomposition is a non-lead flux composition.

In the method, a non-lead flux composition is used in producing asingle-crystal film of bismuth-substituted rare earth-iron-garnet in amode of liquid-phase epitaxial growth, and the single-crystal film thusproduced is prevented from being contaminated with PbO from flux.

This embodiment is described more concretely hereinunder.

The magnetic garnet material of this embodiment comprises asingle-crystal film of Bi-substituted rare earth-iron-garnet, in whichthe concentration fluctuation of the element that substitutes for theiron site in the single-crystal film is 200% or less. This is because ifthe concentration fluctuation of the element such as Pt that substitutesfor the iron site in the film is great, the material of hard magnetismwill have a split and its coercive force is thereby lowered. Theconcentration fluctuation is preferably lower, concretely 150% or less,more preferably 100% or less, even more preferably 50% or less. Theconcentration fluctuation as referred to herein indicates theconcentration fluctuation of the substitute element in the direction ofthe thickness of the single-crystal film. Concretely, when the elementconcentration in the initial stage of the growth of the single-crystalfilm is 100 and that in the latter stage thereof is 150, then theconcentration fluctuation is (150−100)/100, or that is, 50%.

For reducing the concentration fluctuation of the element thatsubstitutes for the iron site in the Bi-substituted rareearth-iron-garnet single-crystal film in this embodiment, also effectiveis reduction in insertion loss, apart from the prevention of splitoccurrence. This is because of the following reasons. When the amount ofPt gradually increases in the process of the growth of the garnetsingle-crystal film and it fluctuates in the direction of the filmthickness, then a part of the garnet single crystal loses its chargebalance. When light enters the garnet single-crystal film thus havinglost its charge balance, it is absorbed by the film. As a result, theinsertion loss in the Faraday rotator formed of the garnetsingle-crystal film increases. Contrary to this, if the charge balanceof the film is well kept as such by reducing the concentrationfluctuation of the element that substitutes for the iron site in thefilm, the insertion loss can be reduced.

As already described hereinabove with reference to FIG. 1, it isdesirable that the amount of Pt in the Bi-substituted rareearth-iron-garnet single-crystal film is as small as possible. However,Pt is readily taken in garnet single-crystal film in the process ofgrowing the film. Therefore, if Pt crucibles are used in the filmproduction, it is difficult to reduce the Pt amount in the film to 0.01or less in the process of LPE that has heretofore been investigated. Theproposal of this embodiment has made it possible to reduce the amount ofPt in the film to 0.01 or less even when Pt crucibles are used inproducing the film. The film of this embodiment enjoys the advantage ofinsertion loss reduction, irrespective of the wavelength of light thatenters it.

The prevention of split occurrence is an effect intrinsic to magneticgarnet material of hard magnetism, but the insertion loss reductionappears even in magnetic garnet material of soft magnetism. Accordingly,this embodiment applies to both types of hard magnetism and softmagnetism.

The saturation magnetization of the magnetic garnet material of thisembodiment at the compensation temperature thereof is 10 G or less. OfBi-substituted rare earth-iron-garnet single crystal, the coercive forceHc is represented by Hc=4K/3M, in which K indicates the constant ofmagnetic anisotropy, and M indicates magnetization. Therefore, thesingle crystal of lower saturation magnetization has a larger coerciveforce Hc. This means that smaller saturation magnetization is preferredfor magnetic garnet material of hard magnetism. Needless-to-say, theideal saturation magnetization is 0 G, but in this embodiment, theacceptable saturation magnetization is 20 G or less, preferably 10 G orless.

The concrete chemical composition of the magnetic garnet material ofthis embodiment is mentioned below. However, the following chemicalcomposition does not always reflect all constitutive elements of thematerial.Bi_((3-x))A_(x)Fe_((5-y))M_(y)O₁₂wherein A is one or more selected from a group of rare earth elementsincluding Y, and Ca and Pb; M is one or more selected from a group ofGa, Al, Ge, Sc, In, Si, Ti, Mg, Mn, Zr, Au, Ir, Rh and Pt; 0.2≦x≦2.5,and 0≦y≦2.0.

In this, M is an element substitutable for the iron site of the crystal.In this embodiment that includes the element substitutable for the ironsite, the indispensable requirement is that the concentrationfluctuation of every substitute element is 200% or less. For example, acase that contains Ga, Ge and Pt is described. In this case, if the Ptconcentration fluctuation is over 200%, the case is outside the scope ofthis embodiment even through the concentration fluctuation of the othertwo, Ga and Ge is not over 50% each.

In the magnetic garnet material that comprises a single-crystal film ofbismuth-substituted rare earth-iron-garnet of this embodiment, theelement A is one or more selected from a group of rare earth elementsincluding Y (Y, Gd, Tb, Yb, Sm, Eu, Dy, Lu, Tm, Er, Ho, La, Ce, Pr, Nd),and Ca and Pb. x that indicates the amount of the element A is0.2≦x≦2.5. If x is smaller than 0.2, the amount of Bi of which the ionicradius is large relatively increases, and if so, the single-crystal filmgrowing through LPE on an LPE substrate could not match with thesubstrate in point of the lattice constant. Contrary to this, if x islarger than 2.5, the amount of Bi relatively decreases, and if so, theFaraday rotation performance of the film material will be low. As aresult, the thickness of the garnet single-crystal film must beincreased, but such thick garnet single-crystal film is difficult toform through LPE and the productivity of the film lowers. Preferably,1.0≦x≦2.3, more preferably 1.3≦x≦2.0. Pb is not an element to bepositively added to the material, but is incorporated into the materialfrom the PbO-containing flux composition used in growing the film forthe material through LPE. Like in the first embodiment of the invention,it is also desirable that three elements of Gd, Tb and Yb are selectedfor the rare earth elements of the material of this embodiment.

In the Bi-substituted rare earth-iron-garnet material of thisembodiment, M is an element to substitute for a part of Fe, and it isone or more selected from a group of Ga, Al, Ge, Sc, In, Si, Ti, Mg, Mn,Zr, Au, Ir, Rh and Pt. Of those, Ga is the most desirable element inview of easy growth of the garnet single-crystal film containing it. Inaddition, Ga is effective for preventing the iron site in garnet singlecrystal from being substituted with Pt. In case where the amount of Ptin the material is reduced, it is desirable that Ge is in the materialfor charge compensation for Pb that is derived from the fluxcomposition.

y that indicates the degree of substitution of Fe with M satisfies0≦y≦2.0. However, for hard magnetic materials, or that is, for thoseshowing a square magnetic hysteresis, y is preferably at least 0.1. Onthe other hand, if y is more than 2.0, unnecessary nuclei form in themelt to give the intended garnet single-crystal film and, if so, thegarnet single-crystal film could not well grow. The preferred range of yfor obtaining hard magnetic garnet single-crystal film is 0.3≦y≦1.7,more preferably 0.4≦y≦1.5. The element M mentioned above is not limitedto those intentionally added to the material but includes any othersthat will be inevitably added thereto during production. One typicalexample of such inevitable elements is Pt that is derived from cruciblesused in LPE.

The bismuth-substituted rare earth-iron-garnet single-crystal film ofthis embodiment may be produced through LPE. Production of thebismuth-substituted rare earth-iron-garnet single-crystal film isdescribed with reference to FIG. 2 and FIG. 3 already referred tohereinabove. First, a starting material composition and a fluxcomposition are put into a crucible 10. The starting materialcomposition contains ferric oxide, rare earth oxide and bismuth oxide.The flux composition contains lead oxide and boron oxide. However, theseare examples and are not limitative. If desired, they may contain anyother oxides and flux components, depending on the chemical compositionof the garnet single-crystal film that is intended to be obtainedherein. The ability of the lead oxide-containing flux composition todissolve the crucible 10 is high. Therefore, when Pt is used for thematerial of the crucible 10, it is desirable that the flux compositionis a non-lead flux composition not containing lead oxide. Specificexamples of the flux composition not containing lead oxide are Bi₂O₃alone, a mixture of Bi₂O₃ and B₂O₃, and a mixture of Bi₂O₃, B₂O₃ andNa₂O.

The most popular material for the crucible 10 is Pt. However, thisembodiments allows use of Au for the crucible 10. This is because thesolubility of Au in flux is low, and, even if Au is in the magneticgarnet material, it has no negative influence on the material, dislikePt. The embodiment of using Au for the crucible 10 includes a case wherethe crucible 10 is entirely formed of Au, and a case where the crucible10 is partly formed of Au, for example, only the inner wall of thecrucible 10 is formed of Au. The concept of the embodiment includes notonly using pure Au but also using Au alloys. The element to be alloyedwith Au includes Ir, Rh and Pt.

The starting material composition and the flux composition put in thecrucible 10 are heated by the heating coil 11 with current runningtherethrough, and melted into a melt 12. For example, while heated atabout 950° C., the melt 12 is stirred with a stirrer 15. This is forimproving the uniformity of the molten condition of the melt 12.Preferably, the stirrer 15 is also formed of Au, like the crucible 10.If the stirrer 15 is formed of Pt, Pt will dissolve out of the stirrer15 into the melt 12 while the melt 12 is stirred. Accordingly, in orderto enjoy the effect of using the crucible 10 that contains Au at leastin the site at which the melt 12 is kept in contact with the crucible10, it is desirable that the stirrer 15 is formed of Au. As so mentionedhereinabove, the terminology “formed of Au” includes not only a casewhere the stirrer 15 itself is formed of Au but also a case where thestirrer 15 itself is formed of a different substance and is coated witha film of Au as well as a case where the part of the stirrer 15 that maybe contacted with the melt 12 is formed of Au and the other part thereofis formed of any other substance than Au.

After stirring the melt 12 with the stirrer 15 has been finished, thetemperature of the melt 12 is lowered to, for example, around 800° C. sothat the melt 12 is in a supercooled condition. In this condition, anLPE substrate 13 is contacted with the melt 12 while rotated whereby agarnet single-crystal film 14 epitaxially grows on the surface of theLPE substrate 13.

In the process of growing the garnet single-crystal film 14, the waferholder 16 that holds the LPE substrate 13 may be contacted with the melt12. Therefore, it is desirable that the wafer holder 16 is also formedof Au. The wafer holder 16 holds the LPE substrate 13 at the tip clawsthereof. Therefore, at least the tip claws are formed of Au.

In case where the single-crystal film is produced through LPE, theatmosphere is generally air. However, when the crucible 10 is formed ofPt and when the oxygen content is over 20% by volume of the atmosphere,Pt forms a compound with oxygen and becomes more soluble. Therefore, incase where such Pt crucible 10 is used, it is desirable that the garnetsingle-crystal film is produced through LPE in a more reducibleatmosphere than air, for example, an inert gas atmosphere such as Ar formore effectively preventing the garnet single-crystal film formed frombeing contaminated with Pt. The garnet single-crystal film produced insuch an oxygen-poor atmosphere may have oxygen defects, but the oxygendefects may be removed by heat treatment of the film (for example, byheating the film at 800° C. for 30 hours). The atmosphere that is morereducible than air in this embodiment includes an atmosphere of inertgas alone, and an inert gas atmosphere that contains 20% or less byvolume of oxygen. This is because the oxygen content of 20% or less byvolume may suppress the Pt dissolution to the acceptable range.

The thickness of the garnet single-crystal film thus obtained throughLPE is larger in some degree than that of the Faraday rotator that isdesired to be finally obtained herein. This is because the film ispolished and then worked into the intended Faraday rotator. The garnetsingle-crystal film to be worked into Faraday rotators shall have aFaraday rotation angle of 45 degrees to the wavelength of light forservice. In other words, the garnet single-crystal film obtained throughLPE is polished to have a thickness that ensures its Faraday rotationangle of 45 degrees. Faraday rotator generally has a thickness of around500 μm or so. After thus polished, the surface of the Faraday rotator ispreferably coated with an antireflection film for reducing insertionloss.

Examples of this embodiments are mentioned below.

EXAMPLE 2-1

Using the device of FIG. 2, a Bi-substituted rare earth-iron-garnetsingle-crystal film was formed through LPE from starting compounds ofbismuth oxide (Bi₂O₃, 4 N), ferric oxide (Fe₂O₃, 4 N), gadolinium oxide(Gd₂O₃, 5 N), terbium oxide (Tb₄O₇, 3 N), ytterbium oxide (Yb₂O₃, 4 N),gallium oxide (Ga₂O₃, 4 N), and germanium oxide (GeO₂, 4 N). The LPEsubstrate 13 used is formed of (111) garnet single crystal((GdCa)₃(GaMgZr)₅O₁₂). The lattice constant of the LPE substrate 13 is1.2497+/−0.0002 nm. In addition to the above-mentioned startingcompounds, a flux composition of lead oxide (PbO, 4 N) and boron oxide(B₂O₃, 5 N) was also put into the crucible 10. The crucible 10 isentirely formed of Pt. After the starting material composition and theflux composition were put into the crucible, these were heated up to950° C. to melt the starting material composition. Then, the resultingmelt 12 was stirred for a predetermined period of time with a Pt stirrer15. After thus stirred, the melt 12 was cooled to 850° C., and a garnetsingle-crystal film 14 began to grow. In the process of growing thegarnet single-crystal film 14, the LPE substrate 13 was held by a waferholder 16 of Pt.

The thus-obtained garnet single-crystal film (Example 2-1) was analyzedfor its composition. As a result, the composition of the garnetsingle-crystal film in the initial stage of the growth thereof wasidentified asBi_(1.1)Gd_(0.18)Tb_(1.38)Yb_(0.3)Pb_(0.03)Fe_(3.99)Ga_(1.01)Ge_(0.03)O₁₂,and the composition thereof in the latter stage of the film growth wasasBi_(1.0)Gd_(0.18)Tb_(1.38)Yb_(0.3)Pb_(0.035)Fe_(4.0)Ga_(1.0)Ge_(0.035)O₁₂.The Pt content of the film was below the detection level. In Example2-1, the elements to substitute for the iron site were Ga and Ge, andtheir concentration fluctuation was 1% and 17%, respectively. The garnetsingle-crystal film was cut into a predetermined size, and polished, andits magnetic properties were measured at different temperatures. As aresult, at the compensation temperature thereof, the saturationmagnetization (4 πMs) of the film sample was 3 G, and the coercive forceHc thereof was 3.5 kOe. The temperature at which the film had thesaturation magnetization could not be the compensation temperature ofthe film in the strict sense of the word, but as so mentionedhereinabove, it is herein referred to as the compensation temperature.Using a Faraday rotation angle meter, the magnetic hysteresis of theFaraday rotation angle of the garnet single-crystal film was determined,and it showed a good squareness profile as in FIG. 8.

Next, the garnet single-crystal film of Example 2-1 was coated with anantireflection film, and worked into a Faraday rotator having a size of1 mm×1 mm×0.5 mm. The insertion loss in this Faraday rotator that hadreceived light having a wavelength of 1.31 μm was measured, and it was0.01 dB.

A garnet single-crystal film (Comparative Example 2-1) was formedbasically in the same manner as above except that its Ga content wasreduced. The chemical composition of the garnet single-crystal film inthe initial stage of the growth thereof was identified asBi_(1.1)Gd_(0.18)Tb_(0.39)Yb_(0.3)Pb_(0.03)Fe_(4.46)Ga_(0.5)Ge_(0.03)Pt_(0.01)O₁₂,and the chemical composition thereof in the latter stage of the filmgrowth was asBi_(1.1)Gd_(0.18)Tb_(1.38)Yb_(0.3)Pb_(0.04)Fe_(4.4)Ga_(0.53)Ge_(0.02)Pt_(0.04)O₁₂.As in these, the film had a Pt concentration gradation increasing fromthe initial stage to the latter stage of the film growth. In ComparativeExample 2-1, the elements to substitute for the iron site were Ga, Geand Pt, and their concentration fluctuation was 6%, 33% and 300%,respectively. To that effect, the concentration fluctuation of oneelement Pt of substituting for the iron site in Comparative Example 2-1is 300%, and is over 200%.

In the same manner as in Example 2-1, the magnetic properties of thegarnet single-crystal film of Comparative Example 2-1 were measured. Asa result, at its compensation temperature, the saturation magnetization(4 πMs) of the film was 30 G. Using a Faraday rotation angle meter, themagnetic hysteresis of the Faraday rotation angle of the garnetsingle-crystal film at its compensation temperature was determined, andit gave a split as in FIG. 9. Also in the same manner as in Example 2-1,the insertion loss in the film at a wavelength of 1.31 μm was measured,and it was 0.06 dB.

As in the above, the Faraday rotator formed of the garnet single-crystalfilm not substantially containing Pt is free from the split given by theFaraday rotator formed of the Pt-containing garnet single-crystal film.This will be because of the following reasons. Pt once taken in garnetsingle crystal and having formed a concentration gradation thereinbreaks the charge balance of the film of garnet single crystal. Thushaving lost its charge balance, the film gives a split and its insertionloss increases.

The films of Example 2-1 and Comparative Example 2-1 were producedsubstantially under the same condition. As so mentioned hereinabove, thePt content of the garnet single-crystal film of Example 2-1 is under thedetection level. This is because of the difference in the Ga content ofthe films of Example 2-1 and Comparative Example 2-1. Specifically, theionic radii of Ga and Pt are near to that of Fe, and when much Gasubstitutes for the iron site, then Pt could no more substitute for Fe.As a result, even if Pt dissolves out of the crucible 10, it will behardly taken in the garnet single-crystal film.

EXAMPLE 2-2

A Bi-substituted rare earth-iron-garnet single-crystal film was grownunder the same condition as in Example 2-1, except that the film growingatmosphere was an Ar gas atmosphere having an oxygen content of 5% byvolume and the film was modified to have a different composition.

In the same manner as in Example 2-1, the garnet single-crystal film(Example 2-2) was analyzed for its composition. As a result, thechemical composition of the garnet single-crystal film in the initialstage of the growth thereof was identified asBi_(1.1)Gd_(0.18)Tb_(1.39)Yb_(0.03)Pb_(0.03)Fe_(4.7)Ga_(0.27)Ge_(0.03)Pt_(0.005)O₁₂andthe composition thereof in the latter stage of the film growth was asBi_(1.1)Gd_(0.18)Tb_(1.39)Yb_(0.03)Pb_(0.003)Fe_(4.7)Ga_(0.27)Ge_(0.025)P_(0.01)O₁₂.The data confirm that even though the Pt crucible 10 is used in growinggarnet single crystal, the Pt content of the resulting garnetsingle-crystal film could be reduced so far as the film growth iseffected in an inert gas atmosphere.

In Example 2-2, the elements to substitute for the iron site were Ga, Geand Pt, and their concentration fluctuation was 0%, 17% and 100%,respectively. The garnet single-crystal film was cut into apredetermined size, and polished, and its magnetic properties weremeasured in the same manner as in Example 2-1. As a result, at thecompensation temperature thereof, the saturation magnetization (4 πMs)of the film sample was 4 G, and the coercive force Hc thereof was 2.5kOe. The magnetic hysteresis of the Faraday rotation angle of the garnetsingle-crystal film was determined also in the same manner as in Example2-1, and it showed a good squareness profile. Next, the garnetsingle-crystal film was coated with an antireflection film, and workedinto a Faraday rotator having a size of 1 mm×1 mm×0.5 mm. The insertionloss in this Faraday rotator that had received light having a wavelengthof 1.31 μm was measured, and it was 0.01 dB.

EXAMPLE 2-3

A Bi-substituted rare earth-iron-garnet single-crystal film was grownunder the same condition as in Example 2-1, except that the fluxcomposition was a mixture of Bi₂O₃ and B₂O₃, the starting materialcomposition did not contain germanium oxide and the film was modified tohave a different composition.

In the same manner as in Example 2-1, the garnet single-crystal film(Example 2-3) was analyzed for its composition. As a result, thechemical composition of the garnet single-crystal film in the initialstage of the growth thereof was identified asBi_(1.1)Gd_(0.22)Tb_(1.38)Yb_(0.3)Fe_(4.25)Ga_(0.75)Pt_(0.002)O₁₂, andthe composition thereof in the latter stage of the film growth was asBi_(1.1)Gd_(0.22)Tb_(1.38)Yb_(0.3)Fe_(4.25)Ga_(0.75)Pt_(0.0025)O₁₂. Thedata confirm that even though the Pt crucible 10 is used in growinggarnet single crystal, the Pt content of the resulting garnetsingle-crystal film could be reduced so far as the film growth iseffected in an inert gas atmosphere. In Example 2-3, the fluxcomposition is a non-lead flux composition not containing PbO, andtherefore the film contained no Pb.

In Example 2-3, the elements to substitute for the iron site were Ga andPt, and their concentration fluctuation was 0% and 25%, respectively.The garnet single-crystal film was cut into a predetermined size, andpolished, and its magnetic properties were measured in the same manneras in Example 2-1. As a result, at the compensation temperature thereof,the saturation magnetization (4 πMs) of the film sample was 2 G, and thecoercive force Hc there of was 4 kOe. The magnetic hysteresis of theFaraday rotation angle of the garnet single-crystal film was determinedalso in the same manner as in Example 2-1, and it showed a goodsquareness profile. Next, the garnet single-crystal film was coated withan antireflection film, and worked into a Faraday rotator having a sizeof 1 mm×1 mm×0.5 mm. The insertion loss in this Faraday rotator that hadreceived light having a wavelength of 1.31 μm was measured, and it was0.01 dB.

EXAMPLE 2-4

According to the same process as in Example 2-1, multiple garnetsingle-crystal films having a different Pt content were produced. The Ptconcentration fluctuation of these garnet single-crystal films in theinitial stage and the latter stage of the film growth was determined. Inaddition, the magnetic hysteresis of the Faraday rotation angle, thesaturation magnetization (4 πMs) and the coercive force Hc of the garnetsingle-crystal films were measured at the compensation temperature ofeach film. The data are given in Table 1.

TABLE 1 Pt Concentration Magnetic Hysteresis of Saturation CoerciveForce No. Fluctuation (%) Faraday Rotation Angle Magnetization (G) (kOe)1 490 split occurred 50 — 2 300 split occurred 30 — 3 180 squarenessprofile 15 1 4 100 squareness profile 4 2.5 5 54 squareness profile 3 36 25 squareness profile 2 4 Note: The magnetic hysteresis, thesaturation magnetization and the coercive force were measured at thecompensation temperature of each film.

As in Table 1, it is understood that the Pt concentration fluctuationover 200% causes a split and increases the saturation magnetization tolarger than 20 G. The coercive force of the samples having the splitcould not be measured accurately. As opposed to these, the samples ofwhich the Pt concentration fluctuation is smaller than 200% have nosplit, and the magnetic hysteresis of the Faraday rotation angle thereofshows a squareness profile.

EXAMPLE 2-5

A Bi-substituted rare earth-iron-garnet single-crystal film was grown inthe same manner as in Example 2-1, except that the crucible 10, thestirrer 15 and the wafer holder 16 were all formed of Au. Thus obtained,the garnet single-crystal film (Example 2-5) was analyzed for itscomposition. Both in the initial stage and in the latter stage of thefilm growth, the grown film had the following chemical composition. Thematerial having this chemical composition is soft magnetic.Bi_(1.1)Gd_(1.2)Yb_(0.67)Pb_(0.03)Fe_(4.97)Ge_(0.03)O₁₂

The garnet single-crystal film was cut into a predetermined size,polished and coated with an antireflection film. This gave a Faradayrotator having a size of 1 mm×1 mm×0.5 mm. The insertion loss in thisFaraday rotator at a wavelength of 1.31 μm was measured, and it was 0.01dB. In Example 2-5, the element that substituted for the iron site wasGe, and its concentration fluctuation was 0%.

A Faraday rotator was formed of a garnet single-crystal film(Comparative Example 2-5) that had been obtained in the same manner asabove except that the crucible 10, the stirrer 15 and the wafer holder16 were all formed of Pt. The composition of the garnet single-crystalfilm wasBi_(1.1)Gd_(1.2)Yb_(0.67)Pb_(0.03)Fe_(4.97)Ge_(0.023)Pt_(0.007)O₁₂ inthe initial stage of the film growth, and wasBi_(1.1)Gd_(1.2)Yb_(0.67)Pb_(0.03)Fe_(4.97)Ge_(0.017)Pt_(0.022)O₁₂ inthe latter stage thereof. The insertion loss in the Faraday rotator at awavelength of 1.31 μm was measured, and it was 0.04 dB.

As in the above, the insertion loss in the Faraday rotator of Example2-5 is reduced owing to the ideal charge compensation attained therein.Contrary to this, the insertion loss in the Faraday rotator ofComparative Example 2-5 is large since the charge balance thereof hasbeen broken.

In Comparative Example 2-5, the elements that substituted for the ironsite were Ge and Pt, and their concentration fluctuation was 26% and214%, respectively.

As described hereinabove, this embodiment provides a hard magnetic,Bi-substituted rare earth-iron-garnet material with no split even at thecompensation temperature thereof. In addition, this embodiment alsoprovides a magnetic Bi-substituted rare earth-iron-garnet materialhaving a reduced insertion loss.

Third Embodiment of the Invention

Next described is the Faraday rotator and the optical device of thethird embodiment of the invention with reference to FIG. 10 to FIG. 18.Bi-substituted rare earth-iron-garnet single-crystal film grown throughLPE is much used for Faraday rotators in optical isolators, opticalcirculators and the like for use in optical communication systems.Optical isolator is a type of optical device, and its role is totransmit light only in one direction and to interrupt the light that hasreflected in its running course to turn back. Based on Faraday effect,Faraday rotator has a function of rotating the plane of polarization oflight, and when it is used in optical isolator, it acts to rotate thepolarization of plane of light by 45 degrees. One typical structure ofoptical isolator comprises a Faraday rotator, two polarizers orpolarizing isolators between which the Faraday rotator is sandwiched andwhich transmit only unidirectionally-polarized light, and an externalmagnet having the function of magnetically saturating the Faradayrotator. FIG. 11 shows the direction in which a Faraday rotatortransmits light, and the direction of the magnetic field around therotator. As in FIG. 11, a magnetic filed is applied to the Faradayrotator 224 b, for example, by an external magnet in the direction ofthe arrow A that is parallel to the light-traveling direction.

One recent investigation in the art is for realizing a hard magnetic,Bi-substituted rare earth-iron-garnet single-crystal film by modifyingthe composition of a soft magnetic, Bi-substituted rareearth-iron-garnet single crystal film (for example, see JP-A 9-185027).Hard magnetic Faraday rotators, or that is, those of permanent magnetismare extremely favorable for down-sized and low-priced optical isolators,as they do not require permanent magnets for imparting a magnetic fieldthereto. For hard magnetic, Bi-substituted rare earth-iron-garnetsingle-crystal film, elements of large magnetic moment such as Tb, Gd,Eu and Ho are selected for the rare earth elements and iron issubstituted with a non-magnetic element such as Ga or Al. Thus modified,the spontaneous magnetization M of the Bi-substituted rareearth-iron-garnet single-crystal film may be reduced at around theoperation temperature of optical isolator, and, as a result, the filmmay have a square hysteresis profile of magnetism and its coercive forceHc may be enlarged.

Regarding the temperature characteristic of the spontaneousmagnetization M thereof, Bi-substituted rare earth-iron-garnetsingle-crystal film that contains a large amount of rare earth elementssuch as Tb, Gd, Eu and Ho has a compensation temperature at which itsspontaneous magnetization M is almost 0. At the compensation temperaturethereof, the overall magnetic moment of the rare earth element ions isthe same as that of the Fe ions in the film, and the apparentmagnetization of the film is almost 0. In general, the coercive force Hcof permanent magnet is larger when the spontaneous magnetization M issmaller. Accordingly, it is desirable that the magnetic film for use inoptical communication is so designed that its compensation temperaturemay fall within the operation range, from −40 to 85° C. of opticaldevices for communication and that its spontaneous magnetization M couldbe lower within the practical operation range of optical devices forcommunication.

However, when hard magnetic, Bi-substituted rare earth-iron-garnetsingle-crystal film is planned and produced according to the methodmentioned above, it has been found that the film shows a specificphenomenon (split) of giving multiple Faraday rotation angles undertemperatures at which the spontaneous magnetization M of the film couldbe extremely reduced. FIG. 12 shows a magnetic hysteresis of the Faradayrotation angle of a Faraday rotator formed of the above-mentioned, hardmagnetic garnet single-crystal film. Its horizontal axis shows amagnetic field, and its vertical axis shows a Faraday rotation angle(degree). As in FIG. 12, the Faraday rotator has two Faraday rotationangles of 45 degrees and 20 degrees. The Faraday rotator thus having thesplit is unfavorable since its Faraday rotation angle reproducibility islow and, in addition, its Faraday rotation angle significantlyfluctuates depending on the varying external magnetic field andtemperature. As a result, the Faraday rotator could not stably give thedesired Faraday rotation angle. In particular, it has been confirmedthat the Faraday rotation angle reproducibility of the Faraday rotatorof the type lowers with temperature change. If such Faraday rotator isused in fabricating optical devices such as optical isolators, theresulting devices will have a problem of light transmission failureowing to the Faraday rotation angle fluctuation.

An attempt has been made for solving the above-mentioned problem, whichcomprises shifting the temperature range of split so as to fall outsidethe operation temperature range, from −40 to 85° C. of optical devices.In this case, however, the film becomes hard magnetic when itsspontaneous magnetization M is relatively large, and its coercive forceHc is therefore extremely small. Accordingly, the film has a problem inthat the magnetic characteristics of the Faraday rotator formed of thefilm are readily changed by the external magnetic field, temperaturechange and shock applied thereto, and the Faraday rotation angle thereoffluctuates. For these reasons, hard magnetic Faraday rotators are not asyet popularized in ordinary optical devices.

An object of this embodiment is to provide a Faraday rotator having goodmagnetic properties and to provide an optical device that comprises it.

The object is attained by a Faraday rotator that comprises a hardmagnetic, Bi-substituted rare earth-iron-garnet single-crystal film andtwo surfaces formed on the single-crystal film for light transmissionthrough them, in which the single-crystal film is represented by achemical formula:Bi_(3-x)R_(x)Fe_(5-y)M_(y)O₁₂wherein R is at least one element selected from rare earth elementsincluding Y, and at least one element selected from Pb and Ca; xsatisfies 1.5<x<2.5; M is at least one element selected from Ga, Al, Sc,In, Si, Ge, Ti, Pt and Mg; and y satisfies 0<y<1.5,

and, when y in one of the two surfaces is represented by y₁ and y in theother is represented by y₂, then y₁ and y₂ satisfy y₂≦y₁≦2y₂.

In the Faraday rotator of this embodiment, y₁ and y₂ preferably satisfyy₁≅y₂.

In the Faraday rotator of this embodiment, y preferably satisfies0<y<0.1.

In the Faraday rotator of this embodiment, M is preferably at least oneelement selected from Ga, Al, Sc, In, Si, Ge, Ti and Mg, not containingPt.

The Faraday rotator of this embodiment preferably has a compensationtemperature falling between −40° C. and 85° C.

The above-mentioned object of this embodiment is also attained by anoptical device that comprises multiple optical elements, in which atleast one optical element is the Faraday rotator of this embodiment.

The Faraday rotator and the optical device comprising it of thisembodiment are described. First described is the principle of theFaraday rotator of this embodiment.

In case where the magnetic characteristics of a Faraday rotator areeverywhere uniform, the rotator should not naturally cause a split eventhough its spontaneous magnetization M is extremely small at around itscompensation temperature. Therefore, the split, if occurred, will bebecause the Faraday rotator comprises a laminate of multiple layershaving different magnetic characteristics. We, the present inventorshave analyzed the magnetic characteristics and the composition ofFaraday rotator in various methods, and, as a result, have found thatthere is an obvious relationship between the composition distribution ofiron and iron-substitutable elements and the split occurrence.Specifically, we have confirmed that, when the composition distributionof iron and iron-substitutable elements of Faraday rotator isnon-uniform in the epitaxial film growth direction (light entering andgoing out direction), then the Faraday rotator has a split.

FIG. 13 shows the relationship between the spontaneous magnetization Mof a Faraday rotator formed of a hard magnetic, Bi-substituted rareearth-iron-garnet single-crystal film, and the temperature thereof. Thehorizontal axis indicates the ambient temperature; and the vertical axisindicates the spontaneous magnetization M. As in FIG. 13, thespontaneous magnetization M is almost 0 at the compensation temperatureTc. The compensation temperature Tc is so controlled that it fallswithin a range between −40° C. and 85° C. that is needed for operationtemperatures of optical devices.

FIG. 14 to FIG. 16 each schematically show the spin orientation of aBi-substituted rare earth-iron-garnet single-crystal film. FIG. 14 showsthe spin orientation at around the compensation temperature Tc of thefilm; FIG. 15 shows it at a temperature T2 higher than the compensationtemperature Tc; and FIG. 16 shows it at a temperature T1 lower than thecompensation temperature Tc. In these drawings, the arrow a shows theorientation and the intensity of the magnetic moment of iron ions; andthe arrow b shows the orientation and the intensity of the magneticmoment of rare earth element ions. As in FIG. 14, the intensity of themagnetic moment of rare earth element ions is almost the same as that ofiron ions at around the compensation temperature Tc. However, as in FIG.15, the intensity of the magnetic moment of rare earth element ions ishigher than that of iron ions at a temperature T2 higher than thecompensation temperature Tc. On the other hand, as in FIG. 16, theintensity of the magnetic moment of iron ions is higher than that ofrare earth element ions at a temperature T1 lower than the compensationtemperature Tc.

Of the Bi-substituted rare earth-iron-garnet single-crystal film thatcontains a large amount of a rare earth element having a large magneticmoment, the compensation temperature Tc increases with increase in theamount of the non-magnetic element that substitutes for iron. When thedegree of substitution with the non-magnetic element in the film iscontrolled to a suitable one, then the compensation temperature Tc ofthe film could be around room temperature, and the film may have a largecoercive force Hc at the operation temperature of optical devices thatis around room temperature.

On the other hand, if the degree of substitution with the non-magneticelement is not uniform in some regions of the film, the film shall havea different compensation temperature Tc in a different region even underthe same temperature condition. As a result, the intensity of themagnetic moment of iron ions and that of rare earth element ionsrelative to the compensation temperature Tc differ in different regionsof the film. Even when the intensity of the magnetic moment of rareearth element ions is almost the same as that of iron ions in someregion of the film, the compensation temperature Tc shall be low in theother region having a larger iron composition ratio than that region,and the intensity of the magnetic moment of iron ions shall be higherthan that of rare earth element ions in that other region. Contrary tothis, in the region having a smaller ion composition ratio, theintensity of the magnetic moment of rare earth element ions shall behigher than that of iron ions. This means that one Faraday rotatorinevitably has multiple regions that differ from each other in the sumof the magnetic moment of iron ions and that of rare earth element ions.These multiple regions have different magnetic characteristics.

FIG. 17A to FIG. 17E schematically show the constitution of a Faradayrotator which has two regions where the sum of the magnetic moments ofiron ions and rare earth element ions differs from each other, andthemagnetic characteristics of each region. As in FIG. 17A, the Faradayrotator 224 b has two regions that differ in point of the sum of themagnetic moments of iron ions and rare earth element ions. The tworegions are adjacent to each other via a virtual face 226 that is almostparallel to the two opposite faces of the rotator via which light entersand goes out of the rotator. FIG. 17B shows the relationship between thespontaneous magnetization M and the temperature of the light-receivingside (phase b) of the Faraday rotator 224 b; and FIG. 17C shows therelationship between the spontaneous magnetization M and the temperatureof the light-emitting side (phase a) of the Faraday rotator 224 b. InFIG. 17B and FIG. 17C, the horizontal axis indicates the ambienttemperature, and the vertical axis indicates the spontaneousmagnetization M. The dotted line c indicates the temperature of theFaraday rotator 224 b. FIG. 17D shows the magnetic hysteresis of thephase b of the Faraday rotator 224 b; and FIG. 17E shows the magnetichysteresis of the phase a of the Faraday rotator 224 b. In FIG. 17D andFIG. 17E, the horizontal axis indicates the magnetic field, and thevertical axis indicates the Faraday rotation angle. In FIG. 17D and FIG.17E, the dotted line extending in the horizontal direction indicates theFaraday rotation angle of 0 degree; and the dotted line extending in thevertical direction indicates the magnetic field of 0.

As in FIG. 17B and FIG. 17C, the phase a differs from the phase b inpoint of the compensation temperature Tc thereof. The compensationtemperature Tc of the phase a is higher than the temperature of theFaraday rotator 224 b; and the compensation temperature Tc of the phaseb is lower than the temperature of the Faraday rotator 224 b.Accordingly, as in FIG. 17D and FIG. 17E, the phase a differs from thephase b in point of the magnetic hysteresis thereof. As a result, themagnetic hysteresis of the Faraday rotator 224 b shall be the sum of themagnetic hysteresis of the phase a and that of the phase b; and theFaraday rotation angle of the rotator shall a split at a temperaturearound the compensation temperature Tc thereof, as in FIG. 12.

The iron composition distribution fluctuation in Bi-substituted rareearth-iron-garnet single-crystal film results from the compositionfluctuation of the element that substitutes for iron during theepitaxial growth of the film. Having noted it, we the present inventorsanalyzed the film for the type of the element that has substituted foriron and for the degree of substitute element composition fluctuation,and, as a result, have found that, when the substitute elementcomposition fluctuation is retarded more highly, then the split can beprevented more effectively and the coercive force Hc of the filmincreases more.

Ga and Al are much used for non-magnetic elements that substitute foriron in Bi-substituted rare earth-iron-garnet single-crystal film, sincethey stabilize the epitaxial growth of the film and since their ionicvalence is the same as that of iron, or that is, their ions aretrivalent like iron ions. Accordingly, the composition distribution ofthe non-magnetic elements such as Ga and Al that are much used in thefilm must be uniform. Regarding Ga and Al, however, the film-growingcondition shall be naturally determined depending on the proportion oftheir oxides to be put into the film-growing crucible along with ironoxide. Therefore, the possibility that the Ga and Al composition will benon-uniform in each region of Faraday rotator is low. Accordingly, theGa and Al composition fluctuation does not have any significantinfluence on the split occurrence under ordinary epitaxial growthcondition.

As other non-magnetic elements, there are mentioned non-magnetic minorsubstitute elements which dissolve out of crucibles and tools into fluxand which substitute for iron in the films formed. Since the minorsubstitute elements are not the starting materials for film growth, theamount of their composition that may be in the Bi-substituted rareearth-iron-garnet single-crystal films formed will be at most 0.1 or so.However, we, the present inventors have found that the compositiondistribution of these minor substitute elements has a significantinfluence on the split occurrence. Specifically, when the compositiondistribution of the non-magnetic minor elements that substitute for ironin the films is not uniform, then the split occurrence in the filmsformed is inevitable. Accordingly, for improving the characteristic ofthe coercive force Hc of Faraday rotator, we have found that thecomposition distribution of the minor substitute elements must beunified. Most preferably, the composition distribution of the minorsubstitute elements is almost uniform in the direction in which thefilms have grown (in the direction of the thickness of the films), orthat is, the amount of the non-magnetic element that has substituted foriron is the same as that of iron between the two surfaces ofBi-substituted rare earth-iron-garnet single-crystal film of Faradayrotator through which light enters and goes out of the rotator. However,even through the composition distribution is not uniform, it does notalways have any negative influence on the practical characteristics ofFaraday rotator. When the amount of each non-magnetic element in onesurface of the two surfaces of Bi-substituted rare earth-iron-garnetsingle-crystal film of Faraday rotator through which light enters andgoes out of the rotator is not smaller than that in the other surfacethereof and when the former is two times or less the latter, then thesplit is prevented and the coercive force Hc of the Faraday rotator maybe on the practical level.

One typical example of the non-magnetic minor substitute elements, whichdissolve out of crucibles and tools into flux and which substitute foriron, is Pt. In general, the containers to receive the startingmaterials for epitaxial growth into garnet single-crystal films areessentially formed of Pt (having a melting point of 1772° C.) as itsreactivity with the flux of PbO, Bi₂O₃ and B₂O₃ is low and its meltingpoint is much higher than the film-growing temperature. Though itsreactivity is low, Pt may react with flux in some degree, and willtherefore gradually dissolve in flux during epitaxial growth to give theintended film. Accordingly, Pt must be specifically so controlled thatthe amount of Pt in one surface of the two surfaces of Bi-substitutedrare earth-iron-garnet single-crystal film of Faraday rotator throughwhich light enters and goes out of the rotator is not smaller than thatin the other surface thereof and the former is two times or less thelatter.

In addition, impurities other than Pt may dissolve out of crucibles andother tools used for substrate fixation into flux, and they may enterthe epitaxially-grown film to form some uneven composition distributiontherein. Even in such a case, the amount of each non-magnetic element inone surf ace of the two surfaces of Bi-substituted rareearth-iron-garnet single-crystal film of Faraday rotator through whichlight enters and goes out of the rotator must not be smaller than thatin the other surface thereof and the former must be two times or lessthe latter.

For further improving the Hc characteristic of Faraday rotator, we, thepresent inventors have investigated the use of Au for forming crucibles,stirring tools (stirrers) that are to stir flux, and fixers forsubstrate fixation, and tried them in growing epitaxial films. Au is anelement that is extremely hardly ionized, and therefore dissolves littlein the flux of PbO, Bi₂O₃ and B₂O₃, and, in addition, even a slightamount of Au having dissolved therein deposits little on the epitaxialfilm of oxides. Accordingly, for removing Pt and other impurities thatmay dissolve out of crucibles and tools and may deposit in the filmsformed, the measures to use Au may be the most effective. Removing Ptand other impurities from the films in that manner realizes ideal hardmagnetic Faraday rotators which have an increased coercive force Hc andhave no split.

However, the melting point of Au is 1064° C. and is near to thefilm-growing temperature. Therefore, crucibles and tools formed of Aumay soften at the film-growing temperature and will be difficult tohandle. To solve the problem, a reinforced material of Pt—Au alloy willbe effective for increasing the strength of crucibles and tools. Thematerial of the type will release a minor amount of Pt, which may enterepitaxial films. Even in such a case, we have confirmed the absence ofany practical problem so far as the amount of Pt in one surface of thetwo surfaces of Bi-substituted rare earth-iron-garnet single-crystalfilm of Faraday rotator through which light enters and goes out of therotator is smaller than that in the other surface thereof and the formeris two times or less the latter.

Regarding the other non-magnetic elements such as Ga and Al in thestarting material composition, which are much substitute for iron in thefilms formed, it is also ideal that their composition in the films doesnot fluctuate. The requirement that the amount of each non-magneticelement in one surface of the two surfaces of Faraday rotator is smallerthan that in the other surface thereof and the former is two times orless the latter also applies to hard magnetic Faraday rotators.

As in the above, the Faraday rotator of this embodiment comprises aBi-substituted rare earth-iron-garnet single-crystal film of a chemicalformula:Bi_(3-x)R_(x)Fe_(5-y)M_(y)O₁₂wherein R is at least one element selected from rare earth elementsincluding Y., and at least one element selected from Pb and Ca; xsatisfies 1.5<x<2.5; M is at least one element selected from Ga, Al, Sc,In, Si, Ge, Ti, Pt and Mg; and y satisfies 0<y<1.5.

The Faraday rotator of this embodiment is formed on the Bi-substitutedrare earth-iron-garnet single-crystal film, and when y in one of the twosurfaces thereof through which light enters and goes out of the rotatoris represented by y₁ and y in the other is represented by y₂, then y₁and y₂ satisfy y₂≦y₁≦2y₂. More preferably, y₁ and y₂ satisfy y₁≅y₂.

FIG. 18 shows the magnetic hysteresis (hard magnetic characteristic) ofthe Faraday rotation angle of the Faraday rotator of this embodiment.The horizontal axis indicates a magnetic field and the vertical axisindicates a Faraday rotation angle (degree). As in FIG. 18, no splitoccurs in the Faraday rotator of this embodiment, and the rotator has arelatively large coercive force Hc and a good square hysteresis profile.As already described hereinabove with reference to FIG. 4 to FIG. 6, theFaraday rotator of this embodiment is usable in optical devices andoptical communication systems.

In this embodiment, the composition distribution in thelight-transmitting direction of each non-magnetic element thatsubstitutes for iron in hard magnetic, Bi-substituted rareearth-iron-garnet single-crystal film is controlled to fall within apredetermined range, and the Faraday rotator of this embodiment that isformed of the thus-controlled single-crystal film does not have a split.

The Faraday rotator of this embodiment is described with reference tothe following concrete Examples.

EXAMPLE 3-1

Tb₄O₇, Yb₂O₃, Bi₂O, Fe₂O₃, Ga₂O₃, GeO₂, PbO and B₂O₃ were put into an Aucrucible, and the crucible was set in an electric furnace. Heatedtherein, the components were melted and then stirred. ACaMgZr-substituted gadolinium-gallium-garnet single-crystal substratewas fixed with an Au fixer, and a Bi-substituted rare earth-iron-garnetsingle-crystal film having a composition of (BiTbYbPb)₃(FeGaGe)₅O₁₂ wasgrown from the melt on the substrate through LPE. This garnetsingle-crystal film was polished and cut, and its two light-transmittingfaces were coated with an antireflection film. This gave a Faradayrotator having a size of 1.5 mm×1.5 mm and a thickness of 450 μm andhaving a Faraday rotation angle of 45 degrees at a wavelength of 1.55μm. Tested with VSM, the compensation temperature of this Faradayrotator was 15° C. At varying temperatures, this was tested with VSM tomeasure its spontaneous magnetization M. The temperature at which thespontaneous magnetization M of the rotator was nearest to 0 at lowerthan the Curie point thereof was determined as the compensationtemperature of the rotator. At 25° C., the Faraday rotator was analyzedfor the relationship between the Faraday rotation angle thereof and theexternal magnetic field applied thereto. As a result, the Faradayrotation angle of the rotator was 45 degrees alone with no split, andthe coercive force Hc thereof was 500 kA/m. Next, the Faraday rotatorwas analyzed for the garnet composition in its two faces of receivingand emitting light. The composition analysis was effected for Ga and Gethrough laser ablation/ICP mass spectrometry of the twolight-transmitting faces of (BiTbYbPb)₃(FeGaGe)₅O₁₂ single crystal ofthe Faraday rotator. The analyzed data were relatively compared witheach other, and the compositional ratio of the constitutive elements inthe light-transmitting two faces was determined. As a result, thecompositional ratio of the constitutive elements in thelight-transmitting two faces of the Faraday rotator was as follows:Based on the standardized amount, 100, of Ga and Ge in one surface ofthe rotator, the relative amount of Ga and Ge in the other surfacethereof was 110 each.

EXAMPLE 3-2

Tb₄O₇, Yb₂O₃, Bi₂O, Fe₂O₃, Ga₂O₃, GeO₂, PbO and B₂O₃ were put into an Aucrucible, and the crucible was set in an electric furnace. Heatedtherein, the components were melted and then stirred. ACaMgZr-substituted gadolinium-gallium-garnet single-crystal substratewas fixed with a Pt fixer, and a Bi-substituted rare earth-iron-garnetsingle-crystal film having a composition of (BiTbYbPb)₃(FeGaGePt)₅O₁₂was grown from the melt on the substrate through LPE. This garnetsingle-crystal film was polished and cut, and its two light-transmittingfaces were coated with an antireflection film. This gave a Faradayrotator having a size of 1.5 mm×1.5 mm and a thickness of 450 μm andhaving a Faraday rotation angle of 45 degrees at a wavelength of 1.55μm. Tested with VSM, the compensation temperature of this Faradayrotator was 15° C. At varying temperatures, this was tested with VSM tomeasure its spontaneous magnetization M. The temperature at which thespontaneous magnetization M of the rotator was nearest to 0 at lowerthan the Curie point thereof was determined as the compensationtemperature of the rotator. At 25° C., the Faraday rotator was analyzedfor the relationship between the Faraday rotation angle thereof and theexternal magnetic field applied thereto. As a result, the Faradayrotation angle of the rotator was 45 degrees with a minor split, and thecoercive force Hc thereof was 200 kA/m. Next, the Faraday rotator wasanalyzed for the garnet composition in its two faces of receiving andemitting light. The composition analysis was effected for Ga, Ge and Ptthrough laser ablation/ICP mass spectrometry of the twolight-transmitting faces of (BiTbYbPb)₃(FeGaGePt)₅O₁₂ single crystal ofthe Faraday rotator. The analyzed data were relatively compared witheach other, and the compositional ratio of the constitutive elements inthe light-transmitting two faces was determined. As a result, thecompositional ratio of the constitutive elements in thelight-transmitting two faces of the Faraday rotator was as follows:Based on the standardized amount, 100, of Ga, Ge and Pt in one surfaceof the rotator, the relative amount of Ga in the other surface thereofwas 100, that of Ge was 110, and that of Pt was 150.

EXAMPLE 3-3

Tb₄O₇, Yb₂O₃, Bi₂O, Fe₂O₃, Ga₂O₃, GeO₂, PbO and B₂O₃ were put into anAu—Pt alloy crucible, and the crucible was set in an electric furnace.Heated therein, the components were melted and then stirred. ACaMgZr-substituted gadolinium-gallium-garnet single-crystal substratewas fixed with a Pt fixer, and a Bi-substituted rare earth-iron-garnetsingle-crystal film having a composition of (BiTbYbPb)₃(FeGaGePt)₅O₁₂was grown from the melt on the substrate through LPE. This garnet singlecrystal film was polished and cut, and its two light-transmitting faceswere coated with an antireflection film. This gave a Faraday rotatorhaving a size of 1.5 mm×1.5 mm and a thickness of 450 μm and having aFaraday rotation angle of 45 degrees at a wavelength of 1.55 μm. Testedwith VSM, the compensation temperature of this Faraday rotator was 15°C. At varying temperatures, this was tested with VSM to measure itsspontaneous magnetization M. The temperature at which the spontaneousmagnetization M of the rotator was nearest to 0 at lower than the Curiepoint thereof was determined as the compensation temperature of therotator. At 25° C., the Faraday rotator was analyzed for therelationship between the Faraday rotation angle thereof and the externalmagnetic field applied thereto. As a result, the Faraday rotation angleof the rotator was 45 degrees with a split, and the coercive force Hcthereof was 120 kA/m. The level of coercive force Hc of 120 kA/m isacceptable for practical use with no problem. Next, the Faraday rotatorwas analyzed for the garnet composition in its two faces of receivingand emitting light. The composition analysis was effected for Ga, Ge andPt through laser ablation/ICP mass spectrometry of the twolight-transmitting faces of (BiTbYbPb)₃(FeGaGePt)₅O₁₂ single crystal ofthe Faraday rotator. The analyzed data were relatively compared witheach other, and the compositional ratio of the constitutive elements inthe light-transmitting two faces was determined. As a result, thecompositional ratio of the constitutive elements in thelight-transmitting two faces of the Faraday rotator was as follows:Based on the standardized amount, 100, of Ga, Ge and Pt in one surfaceof the rotator, the relative amount of Ga in the other surface thereofwas 100, that of Ge was 100, and that of Pt was 200.

COMPARATIVE EXAMPLE 3-1

Tb₄O₇, Yb₂O₃, Bi₂O, Fe₂O₃, Ga₂O₃, GeO₂, PbO and B₂O₃ were put into a Ptcrucible, and the crucible was set in an electric furnace. Heatedtherein, the components were melted and then stirred. ACaMgZr-substituted gadolinium-gallium-garnet single-crystal substratewas fixed with a Pt fixer, and a Bi-substituted rare earth-iron-garnetsingle-crystal film having a composition of (BiTbYbPb)₃(FeGaGePt)₅O₁₂was grown from the melt on the substrate through LPE. This garnetsingle-crystal film was polished and cut, and its two light-transmittingfaces were coated with an antireflection film. This gave a Faradayrotator having a size of 1.5 mm×1.5 mm and a thickness of 450 μm andhaving a Faraday rotation angle of 45 degrees at a wavelength of 1.55μm. Tested with VSM, the compensation temperature of this Faradayrotator was 15° C. At varying temperatures, this was tested with VSM tomeasure its spontaneous magnetization M. The temperature at which thespontaneous magnetization M of the rotator was nearest to 0 at lowerthan the Curie point thereof was determined as the compensationtemperature of the rotator. At 25° C., the Faraday rotator was analyzedfor the relationship between the Faraday rotation angle thereof and theexternal magnetic field applied thereto. As a result, the Faradayrotation angle of the rotator was 45 degrees with a split, and thecoercive force Hc thereof was 10 kA/m. This Faraday rotator isunsuitable to practical use. Next, the Faraday rotator was analyzed forthe garnet composition in its two faces of receiving and emitting light.The composition analysis was effected for Ga, Ge and Pt through laserablation/ICP mass spectrometry of the two light-transmitting faces of(BiTbYbPb)₃(FeGaGePt)₅O₁₂ single crystal of the Faraday rotator. Theanalyzed data were relatively compared with each other, and thecompositional ratio of the constitutive elements in thelight-transmitting two faces was determined. As a result, thecompositional ratio of the constitutive elements in thelight-transmitting two faces of the Faraday rotator was as follows:Based on the standardized amount, 100, of Ga, Ge and Pt in one surfaceof the rotator, the relative amount of Ga in the other surface thereofwas 110, that of Ge was 90, and that of Pt was 250.

In this embodiment, the composition distribution in thelight-transmitting direction of each non-magnetic element thatsubstitutes for iron in hard magnetic, Bi-substituted rareearth-iron-garnet single-crystal film is controlled to fall within apredetermined range, and the Faraday rotator of this embodiment that isformed of the thus-controlled single-crystal film have a relativelylarge coercive force Hc, not having a split. Accordingly, the Faradayrotator of this embodiment is free from the problem with conventionalrotators of which the Faraday rotation angle often fluctuates even withminor change in the external magnetic field, or with minor heat orvibration applied thereto.

As described hereinabove, this embodiment realizes a Faraday rotatorhaving good magnetic characteristics and an optical device thatcomprises it.

Fourth Embodiment of the Invention

Next described is the Faraday rotator and the optical device of thefourth embodiment of the invention with reference to FIG. 19 to FIG.21B. The communication market is expanding these days, and it is muchdesired to reduce the costs of optical communication systems. Manyoptical devices for communication such as optical isolators are used inoptical communication systems. For reducing the costs of opticalcommunication systems, it is effective to reduce the number of opticaldevices to be used in the systems. Given that situation, it is desiredto reduce as much as possible the insertion loss in optical devices tothereby expand the range of light that passes through optical fibers.This is for reducing the number of optical devices to be used in opticalcommunication systems. For this, it is desired to reduce the insertionloss in Faraday rotators that are used in optical devices.

Insertion loss in Faraday rotators will be caused by the following threefactors. The first factor is the light absorption intrinsic to theelements that constitute the Bi-substituted rare earth-iron-garnetsingle crystal films to form Faraday rotators. The second factor is thelight absorption to be caused by the breakdown of the charge balance ofall ions that constitute the garnet single-crystal films. The thirdfactor is the unfavorable characteristic of the antireflection film tobe formed on the light-transmitting faces of the garnet single-crystalfilms. Solution of the problems with these factors enables the reductionin the insertion loss in Faraday rotators.

Bi and Fe that are the essential constitutive elements of Bi-substitutedrare earth-iron-garnet single crystal films do not absorb light fallingwithin a wavelength range of from 1.3 to 1.6 μm. Therefore, when Gd, Ho,Yb and the like that do not also absorb light falling within thewavelength range of from 1.3 to 1.6 μm are selected for the rare earthelements to constitute garnet single-crystal films, then the films willbe free from the insertion loss to be caused by the absorption of lightby the constitutive elements. On the other hand, when the structure andthe thickness of the antireflection film to be formed on thelight-transmitting faces of a Faraday rotator formed of a garnetsingle-crystal film are specifically determined in accordance with therefractive index of the material that forms the antireflection film,then the garnet single-crystal film of the Faraday rotator thus coatedwith the specific antireflection film may reflect little light fallingwithin a specific wavelength range.

The cations that constitute Bi-substituted rare earth-iron-garnetsingle-crystal film are basically trivalent. When these cations becomedivalent or tetravalent, then the charge balance of the Bi-substitutedrare earth-iron-garnet single-crystal film is broken, and it will causelight absorption of the film (for example, see JP-B 6-46604). Forrestoring the charge balance thereof, the garnet single-crystal film issubjected to heat treatment at a suitable temperature in a suitableatmosphere to thereby convert minor Pb ions in the garnet single-crystalfilm into Pb²+ and Pb⁴+, and the charge balance of the film is therebyrestored by these divalent and tetravalent cations. On the other hand,in the garnet single-crystal film having grown in an atmosphere of air,the Pb ions are in the form of Pb²+. Therefore, tetravalent cations ofSi⁴+, Ti⁴+, Ge⁴+ and Pt⁴⁺ are added to the film to keep the chargebalance of the film.

However, even though the above-mentioned conditions to minimize theinsertion loss are defined, there still remains a problem that Faradayrotators with a satisfactorily reduced insertion loss could not beobtained. In fact, even a Faraday rotator with a smallest insertion lossundergoes an insertion loss of about 0.05 dB to light having awavelength of 1.55 μm. For example, therefore, in apolarization-independent optical isolator that comprises two Faradayrotators, the optical loss increases by about 0.1 db owing to theinsertion loss in the Faraday rotators therein.

An object of this embodiment is to provide a Faraday rotator with a morereduced insertion loss and an optical device that comprises it.

The object is attained by a Faraday rotator that comprises aBi-substituted rare earth-iron-garnet single-crystal film and twosurfaces formed on the single-crystal film for light transmissionthrough them, in which the single-crystal film is represented by achemical formula:Bi_(3-x-y)R_(x)A_(y)Fe_(5-z-w)M_(z)B_(w)O₁₂wherein R is atleast one element selected from rare earth elementsincluding Y; A is at least one element selected from Pb, Ca and Cd; xand y satisfy 1.5<x+y<2.5; M is at least one element selected from Ga,Al, Sc and In; B is at least one element selected from Si, Ti, Ge, Ptand Mg; and z and w satisfy 0≦z+w<1.5,

and, when y in one of the two surfaces is represented by y₁ and y in theother is represented by y₂, then y₁ and y₂ satisfy y₂≦y₁≦2y₂; and when win one of the two surfaces is represented by w₁ and w in the other isrepresented by w₂, then w₁ and w₂ satisfy w₂≦w₁≦2w₂.

In the Faraday rotator of this embodiment, y₁ and y₂ preferably satisfyy₁≡y₂, and w₁ and w₂ preferably satisfy w₁≡w₂.

In the Faraday rotator of this embodiment, y preferably satisfies0<y<0.1, and w preferably satisfies 0≦w<0.1.

In the Faraday rotator of this embodiment, B is preferably at least oneelement selected from Si, Ti, Ge and Mg, not containing Pt.

The above-mentioned object of this embodiment is also attained by anoptical device that comprises multiple optical elements, in which atleast one optical element is the Faraday rotator of this embodiment.

The Faraday rotator and the optical device comprising it of thisembodiment are described. First described is the principle of theFaraday rotator of this embodiment.

When the constitutive elements of Bi-substituted rare earth-iron-garnetsingle-crystal film are suitably selected and when the material and thestructure of the antireflection film that covers the garnetsingle-crystal are optimized, then both the optical loss owing to theabsorption of light by the constitutive elements and the optical lossowing to the reflection of light on the surfaces of the Faraday rotatorformed of the antireflection film-coated garnet single-crystal film maybe made almost 0. Having made these optical losses almost 0, we, thepresent inventors have further investigated the reason for the insertionloss in Faraday rotators. As a result, we have found that the reason isbecause the Bi-substituted rare earth-iron-garnet single-crystal filmhaving grown through LPE could not always keep its charge balance.

Bi-substituted rare earth-iron-garnet single-crystal film in whichalmost all cations are trivalent can keep its charge balance when theamount of the divalent cations is equivalent to that of the tetravalentcations in the film. Typical divalent and tetravalent cations in thegarnet single-crystal film are Pb²⁺ and Pt⁴⁺, respectively. Pb resultsfrom PbO that serves as a flux component in film formation, and depositsin the garnet single-crystal film formed. Pt dissolves out of Ptcrucibles into flux, and deposits in the garnet single-crystal filmformed.

However, we have found that Pt has a non-uniform compositiondistribution in the growth direction of the epitaxial film. Concretely,Pt gradually dissolves out into flux during the epitaxial growth of thefilm, and some of it deposits in the garnet single-crystal film formed.Accordingly, the Pt concentration in flux gradually increases duringepitaxial growth of the film, and with it, the amount of Pt in thegarnet single-crystal film formed therefore gradually increases. As aresult, the element to give tetravalent cations is so distributed in thefilm that it gradually increases in the direction of the film growth.

On the other hand, the amount of PbO to be in flux is determined inaccordance with the blend ratio of the starting material put into acrucible. Therefore, the amount of the divalent cations of Pb²+ to be inthe garnet single-crystal film during its epitaxial growth is constant.As a result, the element to give divalent cations is almost uniformlydistributed in the direction of the film growth. In case where otherelements than Pb that may be stabilized as divalent or tetravalentcations in the garnet single-crystal film are in the starting material,the amount of such elements to be in the garnet single-crystal filmformed through epitaxial growth shall be also constant-for the samereason as above.

FIG. 19 shows the outline of the structure of a Faraday rotator and thedirection in which light travels through the rotator. As in FIG. 19, theFaraday rotator 224 b comprises a tabular Bi-substituted rareearth-iron-garnet single-crystal film, and two surfaces A and B formedon the garnet single-crystal film, in which light travels through thetwo surfaces A and B. The surfaces A and B each are coated with anantireflection film (not shown). The direction of the film growth of thegarnet single-crystal film is, for example, from the surface A to thesurface B.

FIG. 20A is a graph showing the distribution of the amount of divalentcations in the direction of the thickness of the garnet single-crystalfilm of the Faraday rotator of FIG. 19. FIG. 20B is a graph showing thedistribution of the amount of tetravalent cations in the direction ofthe thickness of the garnet single-crystal film of the Faraday rotatorof FIG. 19. In FIG. 20A and FIG. 20B, the horizontal axis indicates aposition in the direction of the film thickness. The left edge of thehorizontal axis indicates the position of the surface A, and the rightedge thereof indicates the position of the surface B. In FIG. 20A, thevertical axis indicates the amount of divalent cations; and in FIG. 20B,the vertical axis indicates the amount of tetravalent cations on thesame scale as that of the vertical axis in FIG. 20A. As in FIG. 20A andFIG. 20B, the amount of the divalent cations is almost constanteverywhere in the direction of the film thickness, but contrary to this,the amount of the tetravalent cations simply and almost linearlyincreases from the surface A to the surface B.

The crucible and other tools such as substrate fixer used in filmformation partly dissolve out into the film-forming flux in thecrucible, and the amount of the thus-dissolved element graduallyincreases in the flux during the epitaxial growth of film. In thatcondition, if the dissolved element is taken in the Bi-substituted rareearth-iron-garnet single crystal formed, the amount of the element shallgradually increase in the garnet single-crystal film that grows in amode of epitaxial growth. As a result, when the element having dissolvedin flux becomes divalent or tetravalent cations in the garnetsingle-crystal film formed, then the resulting cations are unevenlydistributed in the direction of the film growth and will therefore breakthe charge balance of the garnet single-crystal film.

By controlling the amount of the divalent and tetravalent cations thatenter the Bi-substituted rare earth-iron-garnet single-crystal film fromthe starting material thereof as well as the amount of the divalent andtetravalent cations that gradually dissolve into flux during the filmgrowth and enter the garnet single-crystal film formed, it will bepossible to make the film keep its charge balance in a specific site inthe direction of the film thickness of the Faraday rotator formed of thefilm. However, the composition of the element that dissolves in fluxduring the epitaxial film growth to be divalent and tetravalent cationstherein fluctuates in the direction of the film growth. Therefore, eventhough the film formed could have its charge balance in some part, itmay not have it in the other part. In the part thereof where the filmcould not have its charge balance, optical loss will be inevitable. Forexample, in the case of FIG. 20A and FIG. 20B, the amount of thedivalent cations and that of the tetravalent cations are both d at thesite C that is nearly the center between the surfaces A and B, and theyare equal. However, the amount of the tetravalent cations increases inthe direction of the film growth, and therefore it is smaller than theamount, d, of the divalent cations in the site nearer to the surface Athan the site C, while it is larger than the amount, d, of the divalentcations in the site nearer to the surface B than the site C.Accordingly, except at the site C, the amount of the divalent cations isnot equal to that of the tetravalent cations, and the film loses itscharge balance. As a result, insertion loss will be inevitable inFaraday rotators formed of the film.

Given that situation, when the elements that may be divalent andtetravalent cations in Bi-substituted rare earth-iron-garnetsingle-crystal film are uniformly distributed in the direction of thefilm growth and when the film is specifically so designed that it maykeep the charge balance between the divalent and tetravalent cationstherein, then the insertion loss in the Faraday rotators formed of thefilm, which may be caused by charge unbalance in the film, could bereduced. Uniform composition distribution of divalent and tetravalentcations in the film is the most effective for optical loss reduction,but even if the composition distribution is not uniform, the insertionloss in the Faraday rotators formed of the film may be significantlyreduced as compared with that in conventional Faraday rotators so far asthe composition distribution fluctuation in the film is limited to apredetermined range.

One typical element that dissolves into flux from crucibles and othertools during film growth is Pt. Pt hardly dissolves in flux of PbO,Bi₂O₃ and B₂O₃ that serve as solvent, and, in addition, it is ahigh-melting-point material (having a melting point of 1772° C.).Therefore, Pt is generally used for the constitutive element ofcrucibles and substrate fixers in LPE. Pt is hardly soluble in solventbut dissolves a little therein. Therefore, it will gradually dissolve inthe flux during epitaxial film growth. Thus dissolved, Pt forms stabletetravalent cations and enters into the garnet single crystal formed,and, as a result, it varies the composition of the growing film.Accordingly, the garnet single-crystal film formed shall contain bothPb²+ having a uniform composition distribution and Pt⁴+ having anon-uniform composition distribution. For these reasons, the insertionloss in the Faraday rotators formed of the film could not be almost 0.

For reducing the insertion loss in Faraday rotators, we, the presentinventors have tried Au for crucibles, flux stirrers and substratefixers that are used for film growth, and have investigated filmformation through epitaxial growth. Au is an element that is extremelyhardly oxidized, and therefore, when it is used as a material forforming crucibles and other tools for film formation, it dissolveslittle in flux and deposits little in the garnet single-crystal filmformed. In addition, Au is stable when it is a trivalent cation.Therefore, even though having entered the garnet single-crystal film, itdoes not break the charge balance of the film. Accordingly, when Au isused as the constitutive material of crucibles and other tools for filmformation for the purpose of producing an epitaxial film with a chargebalance between Pb to form divalent cations and other elements such asSi, Ge and Ti to form tetravalent cations and when Faraday rotators areformed of the thus-produced epitaxial film, then the insertion loss inthe resulting Faraday rotators could be almost 0.

However, the melting point of Au is 1064° C. and is near to thefilm-growing temperature of from 800 to 900° C. Therefore, the strengthof crucibles and tools formed of Au is not satisfactory. To solve theproblem of strength insufficiency, alloys of Pt and Au are used forcrucibles and other tools for film formation. The amount of Pt to bereleased into flux from crucibles and tools formed of Pt—Au alloy duringfilm formation is smaller than that from crucibles and tools formed ofPt alone.

Using crucibles and tools formed of Pt—Au alloy, a Bi-substituted rareearth-iron-garnet single-crystal film was formed, in which thecomposition of Pt⁴+ fluctuated a little. The garnet single-crystal filmwas worked and coated with an antireflection film to give a Faradayrotator. The two surfaces of the garnet single-crystal film throughwhich light enters and goes out the rotator were analyzed for the Ptcomposition therein and compared with each other. The data were analyzedin point of the relation to the insertion loss in the rotator. As aresult, it has been confirmed that, when the composition distributionsatisfies the condition that the amount of Pt in one surface is equal toor is two times or less that of Pt in the other surface, then theinsertion loss in the Faraday rotator is significantly lower than thatin conventional Faraday rotators. On the other hand, using crucibles andtools formed of Au, also formed was a Bi-substituted rareearth-iron-garnet single-crystal film not containing Pt at all. The filmwas worked into a Faraday rotator. The insertion loss in this Faradayrotator was almost 0.

Pt is stable when it is a tetravalent cation. Other elements such as Si,Ge and Ti that are stable when they are tetravalent cations like Pt aredescribed. So far as the element composition distribution satisfies thecondition that the composition in one surface of Faraday rotator isequal to or is two times or less that of the composition in the othersurface thereof, the insertion loss in the Faraday rotator can bereduced. The essential cations in Bi-substituted rare earth-iron-garnetsingle-crystal film are trivalent and tetravalent cations, and thevalence difference between them is only 1. To that effect, the valencedifference between divalent cations and trivalent cations is alsoonly 1. Accordingly, the same as above shall apply also to the elementsthat are stable when they are divalent cations. Concretely, so far asthe composition distribution of the elements to be stable divalentcations satisfies the condition as above, then insertion loss in theFaraday rotators formed of the film may also be reduced. The elementsthat enter garnet single-crystal film through epitaxial growth thereofand form stable divalent cations therein are, for example, Pb, Ca, Cdand Mg. When crucibles and tools that contain any of these elementsexcept Pt capable of forming stable divalent or tetravalent cations areused in producing garnet single-crystal film, these elements willdissolve in flux and will enter the garnet single crystal formed. Evenso, the insertion loss in Faraday rotators formed of the film may bereduced so far as the element composition fluctuation in the film iscontrolled to fall within the predetermined range.

In film growth in air, Pb changes into Pb²⁺ and enters the garnet singlecrystal formed. However, Pb may form Pb⁴⁺ through atmosphere control andheat treatment to keep the charge balance of the film formed, and theinsertion loss through Faraday rotator formed of the film in thatcondition can be reduced. In this case, Pb forms divalent andtetravalent cations in a specific ratio and the thus-formed cations havetheir own composition distribution. Accordingly, so far as the cationssatisfy the condition that the amount of Pb in one surface of the filmis equal to or is two times or less that of Pb in the other surfacethereof, the insertion loss in the Faraday rotator formed of the filmmay be reduced irrespective of the presence or absence of heat treatmentof the film.

As described hereinabove, the Faraday rotator of this embodimentcomprises a Bi-substituted rare earth-iron-garnet single-crystal filmhaving a chemical formula:Bi_(3-x-y)R_(x)A_(y)Fe_(5-z-w)M_(z)B_(w)O₁₂wherein R is at least one element selected from rare earth elementsincluding Y; A is at least one element selected from Pb, Ca and Cd; xand y satisfy 1.5<x+y<2.5; M is at least one element selected from Ga,Al, Sc and In; B is at least one element selected from Si, Ti, Ge, Ptand Mg; and z and w satisfy 0≦z+w<1.5.

The Faraday rotator of this embodiment comprises the Bi-substituted rareearth-iron-garnet single-crystal film and two surfaces formed on thesingle-crystal film for light transmission through them, and, when y inone of the two surfaces is represented by y₁ and y in the other isrepresented by y₂, then y₁ and y₂ satisfy y₂≦y₁≦2y₂; and when w in oneof the two surfaces is represented by w₁ and w in the other isrepresented by w₂, then w₁ and w₂ satisfy w₂≦w₁≦2w₂. Preferably, y₁ andy₂ satisfy y₁≡y₂, and w₁ and w₂ satisfy w₁≅w₂.

FIG. 21A shows the distribution of the amount of divalent cations in thedirection of the thickness of a garnet single-crystal film for theFaraday rotator of this embodiment, and this is a graph corresponding tothe graph of FIG. 20A. FIG. 21B shows the distribution of the amount oftetravalent cations in the direction of the thickness of a garnetsingle-crystal film for the Faraday rotator of this embodiment, and thisis a graph corresponding to the graph of FIG. 20B. As in FIG. 21A andFIG. 21B, both the amount of divalent cations and that of tetravalentcations are almost constant everywhere in the direction of the filmthickness. Accordingly, in this embodiment, the amount of divalent andtetravalent cations to be released from the starting material into thegarnet single-crystal film formed can be controlled to be the same levelof d anytime during the film formation, and the Faraday rotator formedof the film ensures its charge balance everywhere in the direction ofthe film thickness.

As described hereinabove, the insertion loss in the Faraday rotatorformed of the Bi-substituted rare earth-iron-garnet single-crystal filmof this embodiment can be significantly reduced, when the fluctuation inthe composition distribution of the elements that form stable divalentor tetravalent cations in the garnet single-crystal film in thedirection in which the film receives and emits light is controlled tofall within a predetermined range. As in FIG. 4 to FIG. 6 alreadydescribed hereinabove, the Faraday rotator of this embodiment is usablein optical devices and optical communication systems.

The Faraday rotator of this embodiment is described with reference tothe following concrete Examples.

EXAMPLE 4-1

Gd₂O₃, Yb₂O₃, Bi₂O, Fe₂O₃, Ga₂O₃, GeO₂, PbO and B₂O₃ were put into an Aucrucible, and melted and stirred therein. A CaMgZr-substitutedgadolinium-gallium-garnet single-crystal substrate was fixed with an Aufixer, and a Bi-substituted rare earth-iron-garnet single-crystal filmhaving a composition of (BiGdYbPb)₃(FeGaGe)₅O₁₂ was grown from the melton the substrate through LPE. This garnet single-crystal film waspolished and cut, and its two light-transmitting surfaces were coatedwith an antireflection film. This gave a Faraday rotator having a sizeof 1.5 mm×1.5 mm and a thickness of 360 μm and having a Faraday rotationangle of 45 degrees at a wavelength of 1.55 μm. This Faraday rotator wasanalyzed for the garnet composition. The composition analysis waseffected for Pb and Ge through laser ablation/ICP mass spectrometry ofthe two surfaces of the garnet single-crystal film. The analyzed datawere relatively compared with each other, and the compositional ratio ofthe constitutive elements in the two surfaces was determined. As aresult, the compositional ratio of the constitutive elements in the twosurfaces of the Faraday rotator was as follows: Based on thestandardized amount, 100, of Pb and Ge in one surface of the rotator,the relative amount of Pb and Ge in the other surface thereof was 110each. In addition, the insertion loss in the Faraday rotator wasmeasured with light having a wavelength of 1.55 μm, and it was 0 dB.

EXAMPLE 4-2

Gd₂O₃, Yb₂O₃, Bi₂O, Fe₂O₃, Ga₂O₃, GeO₂, PbO and B₂O₃ were put into an Aucrucible, and melted and stirred therein. A CaMgZr-substitutedgadolinium-gallium-garnet single-crystal substrate was fixed with a Ptfixer, and a Bi-substituted rare earth-iron-garnet single-crystal filmhaving a composition of (BiGdYbPb)₃(FeGaGePt)₅O₁₂was grown from the melton the substrate through LPE. This garnet single-crystal film waspolished and cut, and its two light-transmitting surfaces were coatedwith an antireflection film. This gave a Faraday rotator having a sizeof 1.5 mm×1.5 mm and a thickness of 360 μm and having a Faraday rotationangle of 45 degrees at a wavelength of 1.55 μm. This Faraday rotator wasanalyzed for the garnet composition. The composition analysis waseffected for Pb, Ge and Pt through laser ablation/ICP mass spectrometryof the two surfaces of the garnet single-crystal film. The analyzed datawere relatively compared with each other, and the compositional ratio ofthe constitutive elements in the two surfaces was determined. As aresult, the compositional ratio of the constitutive elements in the twosurfaces of the Faraday rotator was as follows: Based on thestandardized amount, 100, of Pb, Ge and Pt in one surface of therotator, the relative amount of Pb in the other surface thereof was 90,that of Ge was 100, and that of Pt was 150. In addition, the insertionloss in the Faraday rotator was measured with light having a wavelengthof 1.55 μm, and it was 0.01 dB.

EXAMPLE 4-3

Gd₂O₃, Yb₂O₃, Bi₂O, Fe₂O₃, Ga₂O₃, GeO₂, PbO and B₂O₃ were put into acrucible of Au-Pt alloy, and melted and stirred therein. ACaMgZr-substituted gadolinium-gallium-garnet single-crystal substratewas fixed with a Pt fixer, and a Bi-substituted rare earth-iron-garnetsingle-crystal film having a composition of (BiGdYbPb)₃ (FeGaGePt)₅O₁₂was grown from the melt on the substrate through LPE. This garnetsingle-crystal film was polished and cut, and its two light-transmittingsurfaces were coated with an antireflection film. This gave a Faradayrotator having a size of 1.5 mm×1.5 mm and a thickness of 360 μm andhaving a Faraday rotation angle of 45 degrees at a wavelength of 1.55μm. This Faraday rotator was analyzed for the garnet composition. Thecomposition analysis was effected for Pb, Ge and Pt through laserablation/ICP mass spectrometry of the two surfaces of the garnetsingle-crystal film. The analyzed data were relatively compared witheach other, and the compositional ratio of the constitutive elements inthe two surfaces was determined. As a result, the compositional ratio ofthe constitutive elements in the two surfaces of the Faraday rotator wasas follows: Based on the standardized amount, 100, of Pb, Ge and Pt inone surface of the rotator, the relative amount of Pb in the othersurface thereof was 90, that of Ge was 100, and that of Pt was 200. Inaddition, the insertion loss in the Faraday rotator was measured withlight having a wavelength of 1.55 μm, and it was 0.03 dB.

COMPARATIVE EXAMPLE 4-1

Gd₂O₃, Yb₂O₃, Bi₂O, Fe₂O₃, Ga₂O₃, GeO₂, PbO and B₂O₃ were put into a Ptcrucible, and melted and stirred therein. A CaMgZr-substitutedgadolinium-gallium-garnet single-crystal substrate was fixed with a Ptfixer, and a garnet single-crystal film having a composition of(BiGdYbPb)₃ (FeGaGePt)₅O₁₂ was grown from the melt on the substratethrough LPE. This garnet single-crystal film was polished and cut, andits two light-transmitting surfaces were coated with an antireflectionfilm. This gave a Faraday rotator having a size of 1.5 mm×1.5 mm and athickness of 360 μm and having a Faraday rotation angle of 45 degrees ata wavelength of 1.55 μm. This Faraday rotator was analyzed for thegarnet composition. The composition analysis was effected for Pb, Ge andPt through laser ablation/ICP mass spectrometry of the two surfaces ofthe garnet single-crystal film. The analyzed data were relativelycompared with each other, and the compositional ratio of theconstitutive elements in the two surfaces was determined. As a result,the compositional ratio of the constitutive elements in the two surfacesof the Faraday rotator was as follows: Based on the standardized amount,100, of Pb, Ge and Pt in one surface of the rotator, the relative amountof Pb in the other surface thereof was 90, that of Ge was 90, and thatof Pt was 250. In addition, the insertion loss in the Faraday rotatorwas measured with light having a wavelength of 1.55 μm, and it was 0.05dB.

As in the above, this embodiment provides a Faraday rotator formed of aBi-substituted rare earth-iron-garnet single-crystal film, in which thecomposition fluctuation of the elements that are stable as divalent andtetravalent cations, in the light-transmitting direction of the film iscontrolled to fall within a predetermined range. The insertion loss inthe Faraday rotator of this embodiment is significantly reduced.

In addition, in the Faraday rotator formed of a Bi-substituted rareearth-iron-garnet single-crystal film of this embodiment, thecomposition distribution of the elements that are stable as divalent andtetravalent cations is unified in the light-transmitting direction ofthe film, and the insertion loss in the Faraday rotator of this type canbe substantially 0.

As described hereinabove, this embodiment realizes a Faraday rotator inwhich the insertion loss is reduced, and realizes an optical device thatcomprises it.

As in the above, the present invention realizes a magnetic garnetmaterial, a Faraday rotator, an optical device and a bismuth-substitutedrare earth-iron-garnet single-crystal film that have the advantages ofreduced insertion loss and improved magnetic properties, and realizes amethod for producing the film and a crucible for its production.

1. A Faraday rotator comprising: a bismuth-substituted rareearth-iron-garnet single-crystal film; and two surfaces formed on thesingle-crystal film for light transmission through them; wherein thesingle-crystal film is represented by a chemical formula:Bi_(3-x-y)R_(x)A_(y)Fe_(5-z-w)M_(z)B_(w)O₁₂ wherein R is at least oneelement selected from a group consisting of rare earth elements and Y; Ais at least one element selected from Pb, Ca and Cd; x and y satisfy1.5<x +y<2.5 and y>0; M is at least one element selected from Ga, Al, Scand In; B is at least one element selected from Si, Ti, Ge, and Mg; andz and w satisfy 0≦z+w<1.5, and, when y in one of the two surfaces isrepresented by y₁ and y in the other is represented by y₂, then y₁ andy₂ satisfy y₂≦y₁≦2y₂; and when w in one of the two surfaces isrepresented by w₁ and w in the other is represented by w₂, then w₁ andw₂ satisfy w₂≦w₁≦2w₂.
 2. The Faraday rotator as claimed in claim 1,wherein y₁ and y₂ satisfy y₁≅y₂, and w₁ and w₂ satisfy w₁≅w₂.
 3. TheFaraday rotator as claimed in claim 1, wherein y further satisfies0<y<0.1, and w further satisfies 0≦w<0.1.